JPS6169272U - - Google Patents
Info
- Publication number
- JPS6169272U JPS6169272U JP15264084U JP15264084U JPS6169272U JP S6169272 U JPS6169272 U JP S6169272U JP 15264084 U JP15264084 U JP 15264084U JP 15264084 U JP15264084 U JP 15264084U JP S6169272 U JPS6169272 U JP S6169272U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- dolly
- switching
- movement
- locus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005856 abnormality Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 2
- 238000007738 vacuum evaporation Methods 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15264084U JPS6169272U (enExample) | 1984-10-09 | 1984-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15264084U JPS6169272U (enExample) | 1984-10-09 | 1984-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6169272U true JPS6169272U (enExample) | 1986-05-12 |
Family
ID=30710696
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15264084U Pending JPS6169272U (enExample) | 1984-10-09 | 1984-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6169272U (enExample) |
-
1984
- 1984-10-09 JP JP15264084U patent/JPS6169272U/ja active Pending
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