JPS6169269U - - Google Patents
Info
- Publication number
- JPS6169269U JPS6169269U JP1984152769U JP15276984U JPS6169269U JP S6169269 U JPS6169269 U JP S6169269U JP 1984152769 U JP1984152769 U JP 1984152769U JP 15276984 U JP15276984 U JP 15276984U JP S6169269 U JPS6169269 U JP S6169269U
- Authority
- JP
- Japan
- Prior art keywords
- compound
- guide hole
- compound vapor
- container
- valve body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984152769U JPS646506Y2 (https=) | 1984-10-09 | 1984-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984152769U JPS646506Y2 (https=) | 1984-10-09 | 1984-10-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6169269U true JPS6169269U (https=) | 1986-05-12 |
| JPS646506Y2 JPS646506Y2 (https=) | 1989-02-20 |
Family
ID=30710818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984152769U Expired JPS646506Y2 (https=) | 1984-10-09 | 1984-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS646506Y2 (https=) |
-
1984
- 1984-10-09 JP JP1984152769U patent/JPS646506Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS646506Y2 (https=) | 1989-02-20 |