JPS6168396U - - Google Patents

Info

Publication number
JPS6168396U
JPS6168396U JP15265384U JP15265384U JPS6168396U JP S6168396 U JPS6168396 U JP S6168396U JP 15265384 U JP15265384 U JP 15265384U JP 15265384 U JP15265384 U JP 15265384U JP S6168396 U JPS6168396 U JP S6168396U
Authority
JP
Japan
Prior art keywords
arm
liquid ejection
ejection mechanisms
holder
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15265384U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15265384U priority Critical patent/JPS6168396U/ja
Publication of JPS6168396U publication Critical patent/JPS6168396U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP15265384U 1984-10-09 1984-10-09 Pending JPS6168396U (ref)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15265384U JPS6168396U (ref) 1984-10-09 1984-10-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15265384U JPS6168396U (ref) 1984-10-09 1984-10-09

Publications (1)

Publication Number Publication Date
JPS6168396U true JPS6168396U (ref) 1986-05-10

Family

ID=30710706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15265384U Pending JPS6168396U (ref) 1984-10-09 1984-10-09

Country Status (1)

Country Link
JP (1) JPS6168396U (ref)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05347289A (ja) * 1991-12-11 1993-12-27 Enya Syst:Kk ウエ−ハ洗浄方法及び装置
JP2002066473A (ja) * 2000-09-04 2002-03-05 Dainippon Screen Mfg Co Ltd 基板処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05347289A (ja) * 1991-12-11 1993-12-27 Enya Syst:Kk ウエ−ハ洗浄方法及び装置
JP2002066473A (ja) * 2000-09-04 2002-03-05 Dainippon Screen Mfg Co Ltd 基板処理装置

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