JPS6168396U - - Google Patents
Info
- Publication number
- JPS6168396U JPS6168396U JP15265384U JP15265384U JPS6168396U JP S6168396 U JPS6168396 U JP S6168396U JP 15265384 U JP15265384 U JP 15265384U JP 15265384 U JP15265384 U JP 15265384U JP S6168396 U JPS6168396 U JP S6168396U
- Authority
- JP
- Japan
- Prior art keywords
- arm
- liquid ejection
- ejection mechanisms
- holder
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15265384U JPS6168396U (enExample) | 1984-10-09 | 1984-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15265384U JPS6168396U (enExample) | 1984-10-09 | 1984-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6168396U true JPS6168396U (enExample) | 1986-05-10 |
Family
ID=30710706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15265384U Pending JPS6168396U (enExample) | 1984-10-09 | 1984-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6168396U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05347289A (ja) * | 1991-12-11 | 1993-12-27 | Enya Syst:Kk | ウエ−ハ洗浄方法及び装置 |
| JP2002066473A (ja) * | 2000-09-04 | 2002-03-05 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
-
1984
- 1984-10-09 JP JP15265384U patent/JPS6168396U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05347289A (ja) * | 1991-12-11 | 1993-12-27 | Enya Syst:Kk | ウエ−ハ洗浄方法及び装置 |
| JP2002066473A (ja) * | 2000-09-04 | 2002-03-05 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |