JPS6168258U - - Google Patents

Info

Publication number
JPS6168258U
JPS6168258U JP1984153395U JP15339584U JPS6168258U JP S6168258 U JPS6168258 U JP S6168258U JP 1984153395 U JP1984153395 U JP 1984153395U JP 15339584 U JP15339584 U JP 15339584U JP S6168258 U JPS6168258 U JP S6168258U
Authority
JP
Japan
Prior art keywords
photomask
microns
thickness
utility
glass substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984153395U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984153395U priority Critical patent/JPS6168258U/ja
Publication of JPS6168258U publication Critical patent/JPS6168258U/ja
Pending legal-status Critical Current

Links

JP1984153395U 1984-10-11 1984-10-11 Pending JPS6168258U (US07321065-20080122-C00160.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984153395U JPS6168258U (US07321065-20080122-C00160.png) 1984-10-11 1984-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984153395U JPS6168258U (US07321065-20080122-C00160.png) 1984-10-11 1984-10-11

Publications (1)

Publication Number Publication Date
JPS6168258U true JPS6168258U (US07321065-20080122-C00160.png) 1986-05-10

Family

ID=30711417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984153395U Pending JPS6168258U (US07321065-20080122-C00160.png) 1984-10-11 1984-10-11

Country Status (1)

Country Link
JP (1) JPS6168258U (US07321065-20080122-C00160.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876833A (ja) * 1981-11-02 1983-05-10 Konishiroku Photo Ind Co Ltd 画像形成材料
JPS58152241A (ja) * 1982-03-08 1983-09-09 Toshiba Corp 高精度マスクの製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876833A (ja) * 1981-11-02 1983-05-10 Konishiroku Photo Ind Co Ltd 画像形成材料
JPS58152241A (ja) * 1982-03-08 1983-09-09 Toshiba Corp 高精度マスクの製造方法

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