JPS6168005U - - Google Patents

Info

Publication number
JPS6168005U
JPS6168005U JP15403184U JP15403184U JPS6168005U JP S6168005 U JPS6168005 U JP S6168005U JP 15403184 U JP15403184 U JP 15403184U JP 15403184 U JP15403184 U JP 15403184U JP S6168005 U JPS6168005 U JP S6168005U
Authority
JP
Japan
Prior art keywords
enclosure
clean
air
front side
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15403184U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0237764Y2 (US06826419-20041130-M00005.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15403184U priority Critical patent/JPH0237764Y2/ja
Publication of JPS6168005U publication Critical patent/JPS6168005U/ja
Application granted granted Critical
Publication of JPH0237764Y2 publication Critical patent/JPH0237764Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Ventilation (AREA)
JP15403184U 1984-10-11 1984-10-11 Expired JPH0237764Y2 (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15403184U JPH0237764Y2 (US06826419-20041130-M00005.png) 1984-10-11 1984-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15403184U JPH0237764Y2 (US06826419-20041130-M00005.png) 1984-10-11 1984-10-11

Publications (2)

Publication Number Publication Date
JPS6168005U true JPS6168005U (US06826419-20041130-M00005.png) 1986-05-09
JPH0237764Y2 JPH0237764Y2 (US06826419-20041130-M00005.png) 1990-10-12

Family

ID=30712025

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15403184U Expired JPH0237764Y2 (US06826419-20041130-M00005.png) 1984-10-11 1984-10-11

Country Status (1)

Country Link
JP (1) JPH0237764Y2 (US06826419-20041130-M00005.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62200610U (US06826419-20041130-M00005.png) * 1986-06-10 1987-12-21
JPS6348707U (US06826419-20041130-M00005.png) * 1986-09-17 1988-04-02
JPS6348706U (US06826419-20041130-M00005.png) * 1986-09-17 1988-04-02

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62200610U (US06826419-20041130-M00005.png) * 1986-06-10 1987-12-21
JPS6348707U (US06826419-20041130-M00005.png) * 1986-09-17 1988-04-02
JPS6348706U (US06826419-20041130-M00005.png) * 1986-09-17 1988-04-02

Also Published As

Publication number Publication date
JPH0237764Y2 (US06826419-20041130-M00005.png) 1990-10-12

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