JPS6167581A - Manufacture of aluminum covered steel sheet - Google Patents

Manufacture of aluminum covered steel sheet

Info

Publication number
JPS6167581A
JPS6167581A JP18858084A JP18858084A JPS6167581A JP S6167581 A JPS6167581 A JP S6167581A JP 18858084 A JP18858084 A JP 18858084A JP 18858084 A JP18858084 A JP 18858084A JP S6167581 A JPS6167581 A JP S6167581A
Authority
JP
Japan
Prior art keywords
plate
aluminum
tin
zinc
base metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18858084A
Other languages
Japanese (ja)
Inventor
Minoru Kitayama
北山 實
Teppei Tamura
田村 哲平
Hideo Koyahara
小屋原 英雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP18858084A priority Critical patent/JPS6167581A/en
Publication of JPS6167581A publication Critical patent/JPS6167581A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/22Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded
    • B23K20/227Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded with ferrous layer
    • B23K20/2275Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating taking account of the properties of the materials to be welded with ferrous layer the other layer being aluminium

Abstract

PURPOSE:To improve the workability of an Al covered steel but by making a zinc base metal or a tin base metal adhere in advance to only an Al plate or both the Al plate and a steel sheet on the joint surface of both the plates, and executing the pressure welding. CONSTITUTION:An Al plate is plated by substituting zinc or tin and Al by an alkaline zinc water solution or an alkaline tin water solution, and a zine base metal or a tin base metal is made to adhere to the Al plate. Subsequently, at a surface temperature of 50-300 deg.C, these Al plate and steel sheet are welded by pressure and joined by a reduction rate of about <=10%. In this case, the zinc base metal or the tin base metal can be made to adhere in advance to only the Al plate. According to this method, the metal which has been made to adhere to the Al plate or both the Al plate and the steel sheet forms a diffusion layer at a low temperature, therefore, a large joint strength is obtained by a low reduction rate. Also, owing to a low rolling reduction joint, softening becomes unnecessary, and the cover is not peeled off. Accordingly, the workability is improved.

Description

【発明の詳細な説明】 産業上の利用分野 未発ヴJはアルミニウム被覆鋼板の製造方法に関するも
のである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a method for manufacturing aluminum-coated steel sheets.

従来の技術 アルミニウム被覆鋼板は従来より例えば特開昭58−1
41882号公報などに示される、いわゆる冷間圧接法
によって製造されている。
Conventional technology Aluminum-coated steel sheets have been developed, for example, in Japanese Patent Application Laid-open No. 58-1.
It is manufactured by a so-called cold pressure welding method as disclosed in Japanese Patent No. 41882 and the like.

発明が解決しようとする問題点 しかるにこのような冷間圧接法では鋼板の圧■率が数1
0%以上となるため、圧接後500〜600℃の温度で
の鋼板の軟化焼鈍が必要となる。しかしなかも、この温
度では鉄とアルミニウムとが厚い合金層を形成すること
になり このような厚い合金層は通常著しく脆いため、
加工等に際し剥離しやすい、すなわち厚い合金層の生成
したアルミニウム被覆鋼板を加工すると被覆が@離する
ので、このような表面処理鋼板は加工用には不適当であ
って、表面処理鋼板としての用途は制約される事になる
。即ち従来の冷間圧接法で製造されたアルミニウム被覆
鋼板には自らその用途に制約かあった。
Problems to be Solved by the Invention However, in this cold welding method, the pressure ratio of the steel plate is several 1.
Since it becomes 0% or more, it is necessary to soften the steel plate at a temperature of 500 to 600°C after pressure welding. However, at this temperature, iron and aluminum form a thick alloy layer, and such thick alloy layers are usually extremely brittle.
When processing an aluminum-coated steel sheet with a thick alloy layer that is likely to peel off during processing, the coating will separate, so such surface-treated steel sheets are unsuitable for processing, and are not suitable for use as surface-treated steel sheets. will be restricted. That is, aluminum-coated steel sheets manufactured by the conventional cold pressure welding method have their own limitations in their uses.

問題点を解決中るための手段 本発明者らはこのような従来技術の問題へを解決↑るた
めに種々検討を行った結渠、アルミニウム被覆鋼板を製
造する際、あらかじめアルミニウム側、又はアルミニウ
ム側および鋼板側の両者の接合面に所定目付量の亜鉛基
金属または錫基金属を付着させておくと、鋼板の圧下率
が10%以下でもアルミニウム板と鋼板を接合すること
が可能になり、これに伴って圧接後軟化焼鈍も省略し得
るという優れた効果を宥する製造方法を開発したもので
ある。
Means for Solving the Problems The present inventors have conducted various studies in order to solve the problems of the prior art. By attaching a predetermined amount of zinc-based metal or tin-based metal to the joint surfaces of both the side and the steel plate side, it becomes possible to join the aluminum plate and the steel plate even if the rolling reduction of the steel plate is 10% or less. Along with this, we have developed a manufacturing method that has the excellent effect of omitting softening annealing after pressure welding.

即ち本発明はアルミニウム板と鋼板を互に接合しアルミ
ニウム被覆鋼板を製造するにあたり、アルミニウム板、
又はアルミニウム板と鋼板の両者の接合面に夫々あらか
じめ亜鉛基金属または5i基金属を付着せしめたのち、
これらアルミニウム板と鋼板とを圧接することを特徴と
するアルミニウム被覆鋼板の製造方法である。
That is, the present invention involves bonding an aluminum plate and a steel plate to each other to produce an aluminum-coated steel plate.
Or, after adhering a zinc-based metal or a 5i-based metal to the joint surfaces of both the aluminum plate and the steel plate,
This is a method for manufacturing an aluminum coated steel plate, which is characterized by press-welding these aluminum plates and steel plates.

作用 以下本発明の詳細な説明する。action The present invention will be explained in detail below.

まず本発明の対象とする鋼板とは通常の軟鋼、構造用鋼
、低合金または高合金高張力鋼、ステンレス鋼などから
なる鋼板で、通常の使用に供される板厚の鋼板を指す。
First, the steel plate to which the present invention is directed refers to a steel plate made of ordinary mild steel, structural steel, low-alloy or high-alloy high-strength steel, stainless steel, etc., and has a thickness suitable for normal use.

またアルミニウム板とはA9を主成分とする金1属板で
、通常の使用に供される板厚の金属板を指す。
Further, the aluminum plate refers to a metal plate whose main component is A9, and which has a thickness suitable for normal use.

次に本発明の最大の骨子どするところは、アルミニウム
板の接合面、又はアルミニウム板と鋼板の接合面夫々に
、亜鉛基金属または錫基金属を付着せしめたのち、これ
らアルミニウム板と鋼板とを接合させることにある。こ
こで云うl111鉛基金属とは金属Znを主成分とする
金属または合金を指し、副成分としてFe、 Mg、 
Ni、 Sn等の1種類以1−の金属を含むことが出来
る。また錫基金属とは金属Snを主成分とする金属また
は合金を指し、副成分としてPb、 Znを含むことが
出来るものである。
Next, the main point of the present invention is to attach zinc-based metal or tin-based metal to the joint surfaces of aluminum plates or aluminum plates and steel plates, respectively, and then connect these aluminum plates and steel plates. It is about joining. The l111 lead-based metal referred to here refers to a metal or alloy whose main component is metal Zn, with subcomponents such as Fe, Mg,
It can contain one or more metals such as Ni and Sn. Furthermore, the term "tin-based metal" refers to a metal or alloy whose main component is metal Sn, and which can contain Pb and Zn as subcomponents.

次にアルミニウム板と鋼板の圧接接合面にあらかじめ亜
鉛基金属または錫基金属を付着させることが必要な理由
を述べる。
Next, the reason why it is necessary to attach a zinc-based metal or a tin-based metal in advance to the press-welded joint surface of an aluminum plate and a steel plate will be described.

2種類の金属板を圧下して接合させるためには、接合部
に極薄い拡散層が形成されることが必要である。アルミ
ニウム板と鋼板を接合させる場合も同様である。ところ
がアルミニウムは表面に緻密な酸化層があることから、
低い圧下率では鉄と拡散層を形成しえない。
In order to join two types of metal plates by pressing down, it is necessary to form an extremely thin diffusion layer at the joint. The same applies when joining an aluminum plate and a steel plate. However, since aluminum has a dense oxide layer on its surface,
A diffusion layer cannot be formed with iron at a low rolling reduction rate.

しかしながら圧接時の温度で拡散層を形成する金属がア
ルミニウム板と鋼板に付着していれば、アルミニウム板
と鋼板は低い圧下率で接合させることが可能になる。
However, if the metal that forms the diffusion layer adheres to the aluminum plate and the steel plate at the temperature during pressure welding, the aluminum plate and the steel plate can be joined at a low rolling reduction ratio.

Zn、 Snは常温での拡散速度が大きく、これらの金
属を主成分として含む金属が鋼板、アルミニウム板に付
着していれば、低い圧下率でアルミニウム板と鋼板とを
圧接することが可能となる。
Zn and Sn have a high diffusion rate at room temperature, and if metals containing these metals as main components are attached to steel plates and aluminum plates, it becomes possible to pressure-weld the aluminum plate and the steel plate with a low rolling reduction rate. .

ここで付着すべき金属が亜鉛基金属と錫基金属に限定さ
れる理由を述べる。
Here, the reason why the metals to be deposited are limited to zinc-based metals and tin-based metals will be explained.

これらの金属の必要条件は第一に拡散層を常温付近で形
成しうろこと。
The first requirement for these metals is that the diffusion layer can be formed at around room temperature.

第二にアルミニウム板および鋼板にめっきなどにより付
着せしめることが容易であること。
Second, it is easy to attach to aluminum plates and steel plates by plating.

第三に工業的に利用しうる程度に安価であることである
Thirdly, it is cheap enough to be used industrially.

例えば、 Naは低融点金属であるから、拡散層を形成
しやすいと考えられるが、めっきすることは困難である
。 Gu、Ni基金属も常温付近では拡散層を形成しな
い、 Bi、Pbはめっきすることは不可能ではないが
容易ではない。
For example, since Na is a low melting point metal, it is thought that it is easy to form a diffusion layer, but it is difficult to plate it. Gu and Ni-based metals also do not form a diffusion layer at room temperature, and it is not impossible to plate Bi and Pb, but it is not easy.

以上の理由から、接合面に付着せしめる金属としては亜
鉛基金属、錫基金属か適している。この場合亜鉛基金属
または錫基金属は少なくともアルミニウム板側の接合面
に付着させることが必要である。アルミニウム板は緻密
な酸化物層でおおわれているため、アルミニウムと鋼板
よりも、亜鉛ま−たは錫で被覆されたアルミニウム板と
鋼板の方が圧接によって、より強固に接合する拡散層を
形成することになる。更に鋼板の接合面にも亜鉛基金属
または錫基金属を付着させておけば、これら金属を付着
させたアルミニウム板に裸の鋼板を圧接するよりも拡散
層を形成しやすくなり、アルミニウム板と鋼板の接合強
度がさらに増大する。
For the above reasons, zinc-based metals and tin-based metals are suitable as the metal to be adhered to the joint surface. In this case, it is necessary to attach the zinc-based metal or the tin-based metal to at least the joint surface on the aluminum plate side. Since aluminum plates are covered with a dense oxide layer, aluminum plates and steel plates coated with zinc or tin form a diffusion layer that creates a stronger bond through pressure welding than aluminum plates and steel plates. It turns out. Furthermore, if a zinc-based metal or a tin-based metal is attached to the joining surface of the steel sheets, it will be easier to form a diffusion layer than when a bare steel sheet is pressure-bonded to an aluminum sheet to which these metals are attached, and the aluminum sheet and the steel sheet will be bonded together. further increases the bond strength.

なおこの場合鋼板側のみに亜鉛・錫等の金属を范着して
アルミニウム板を接着せしめる特開昭58−’3358
8号公報の技術が知られているが、かかる「段は、アル
ミニウム板表面が緻密な酸化物層に被覆されているため
、圧接しても充分な接合強度が得られないという聞届が
ある0本発明は後に述べるように、アルミニウムの酸化
物層を除去しながら、亜鉛または錫を金属状アルミニウ
ムの表面に被覆することから本発明の効果が得られるの
である。
In this case, JP-A-58-'3358, in which metals such as zinc and tin are applied only to the steel plate side and the aluminum plate is bonded, is used.
Although the technique disclosed in Publication No. 8 is known, it is reported that sufficient bonding strength cannot be obtained even when pressure welding in such steps because the surface of the aluminum plate is covered with a dense oxide layer. As described later, the effects of the present invention can be obtained by coating the surface of metallic aluminum with zinc or tin while removing the aluminum oxide layer.

アルミニウム板に亜鉛基金属または錫基金属を付着せし
める手段はアルカリ性亜鉛水溶液(亜鉛酸水溶液)また
はアルカリ性錫水溶液(錫酸水溶液)で亜鉛または錫と
アルミニウムを置換めっきする手段が有効である。
An effective means for attaching a zinc-based metal or a tin-based metal to an aluminum plate is displacement plating of zinc or tin with aluminum using an alkaline zinc aqueous solution (zinc acid aqueous solution) or an alkaline tin aqueous solution (stannic acid aqueous solution).

また亜鉛基合金、錫基台金を鋼板に付着せしめる手段は
電気めっき、溶融めっきまたは蒸着法のいずれでもよい
Further, the means for attaching the zinc-based alloy or tin-based metal to the steel plate may be electroplating, hot-dip plating, or vapor deposition.

なおこれらの金属の付着量はアルミニウム板、鋼板の夫
々の接合面について0.5g/m’以上であることが好
ましい、0゜5g/lr+’未満では効果に乏しい。一
方20g/m’超に増やしても接合力は増大するが効果
が飽和する。
The amount of these metals deposited on each joint surface of the aluminum plate and the steel plate is preferably 0.5 g/m' or more; if it is less than 0.5 g/lr+', the effect is poor. On the other hand, even if the bonding force is increased to more than 20 g/m', the bonding force increases, but the effect is saturated.

このように亜鉛基または錫基金属を付nせしめた上で圧
接すると、前記のように容易に拡散層が形成されるため
、低圧下率で良好な接合状、態を得ることが出来る。即
ちこの場合の圧下率は鋼板について10%以下で十分で
ある。lO%超では鋼板の軟化焼鈍が必要となるか、圧
下率を10%以下に保てることによって、該焼鈍を省略
することが出来るので、実用上の効果は大である。
When a zinc-based or tin-based metal is applied and pressure-bonded in this manner, a diffusion layer is easily formed as described above, so that a good bonding state and condition can be obtained at a low rolling reduction rate. That is, in this case, a rolling reduction ratio of 10% or less is sufficient for the steel plate. If it exceeds 10%, softening annealing of the steel plate is required, or by keeping the rolling reduction at 10% or less, the annealing can be omitted, which has a great practical effect.

また圧接時の板温は、アルミニラL、板と鋼板の界面温
度が50〜300℃が好ましい、 50℃未満では接合
力が小さく、また300°C超では異種金属と鋼板また
はアルミニウム板が厚い合金層を形成し接合力が低下す
る。
In addition, the plate temperature during pressure welding is preferably 50 to 300°C at the interface temperature between the aluminum plate and the steel plate. If it is less than 50°C, the bonding force is small, and if it exceeds 300°C, the dissimilar metal and the steel plate or aluminum plate are thick alloys. Forms a layer and reduces bonding strength.

次に本発明の効果を実施例により更に具体的に説明する
Next, the effects of the present invention will be explained in more detail with reference to Examples.

実施例 第1表にアルミニウム板および鋼板の種類、ならびに接
合界面のめっき条件と接合強度の関係を示す、同表にお
いてNo、l、2は比較例、N093〜7は本発明例(
寡)である。
Example Table 1 shows the types of aluminum plates and steel plates, and the relationship between the plating conditions at the bonding interface and the bonding strength. In the table, Nos., 1, and 2 are comparative examples, and Nos.
is small).

No、lはアルミニウム板にめっきが施されていないた
め、アルミニウム板と鋼板は接合しない。
In No. 1, the aluminum plate is not plated, so the aluminum plate and the steel plate are not joined.

NO,2は鋼板に亜鉛めっきが行われているが、アルミ
ニウム板にめっきが施されていないため接合強度は3に
、g/25mmで低い。
In NO.2, the steel plate is galvanized, but the aluminum plate is not plated, so the joint strength is low at 3, g/25mm.

これに対しN003はアルミニウム板に亜鉛めっきを施
すことにより、高い接合力を得た。
On the other hand, N003 achieved high bonding strength by applying zinc plating to the aluminum plate.

N094は鋼板に電気Zn−Xlめっきを行い、アルミ
ニウム板には置換Znめっきを行ったものであって、N
003よりも更に高い接合力が得られた。
N094 is a steel plate subjected to electrolytic Zn-Xl plating and an aluminum plate subjected to displacement Zn plating.
Even higher bonding strength than 003 was obtained.

No、5は鋼板にはゼンジマ一方式の溶融亜鉛めっきラ
インで製造した溶融亜鉛めっき鋼板を用い、これに錫を
めっきしたアルミニウム板を圧接したものである。この
場合アルミニウム板はO,Immで薄いため、はく難接
着強さ試験(J l5K8854)によって破断したが
、これはアルミニウム板が鋼板に対し、十分な接合力を
有することを意味する。
In No. 5, a hot-dip galvanized steel sheet produced on a Sendzima one-way hot-dip galvanizing line was used as the steel sheet, and a tin-plated aluminum sheet was pressure-welded to this. In this case, since the aluminum plate is thin (O, Imm), it was broken in the non-peel adhesive strength test (J 15K8854), which means that the aluminum plate has sufficient bonding strength to the steel plate.

No、6は鋼板には冷延鋼板、アルミニウム板には錫め
っきしたものを用いた。接合強度は4kg/25mmで
No、5より接合強度が小さいが接合可能でめる。
In No. 6, a cold-rolled steel plate was used as the steel plate, and a tin-plated aluminum plate was used. The bonding strength is 4kg/25mm, which is lower than No. 5, but it is possible to bond.

No、7はアルミニウム板に対するZnHM量カ0.3
g/+TT’であり、N005に比較すると接合強度は
小さいが、N081.2に比較すると大きい。
No. 7 is the amount of ZnHM relative to the aluminum plate: 0.3
g/+TT', and the bonding strength is lower than that of N005, but greater than that of N081.2.

なお、上記アルミニウム板と鋼板の接合強度(接合力)
の測定はJISK6854 (接着剤のは< flI 
J?C看強さ試験方法)に準拠して行った。
In addition, the bonding strength (bonding force) between the above aluminum plate and steel plate
The measurement is based on JISK6854 (for adhesives < flI
J? The test was carried out in accordance with C-Visual Strength Test Method).

発明の効果 以北の実施例からも明らかな如く、本発明によって加工
性の良好なアルミニウム被覆鋼板を得ることが可能にな
り、産業上の利用価値は極めて高いものがある。
Effects of the Invention As is clear from the examples below, the present invention makes it possible to obtain an aluminum-coated steel sheet with good workability, and has extremely high industrial utility value.

Claims (2)

【特許請求の範囲】[Claims] (1)アルミニウム板と鋼板とを互に接合し、アルミニ
ウム被覆鋼板を製造するにあたり、アルミニウム板の接
合面にあらかじめ亜鉛基金属または錫基金属を付着せし
めたのち、鋼板に圧接することを特徴とするアルミニウ
ム被覆鋼板の製造方法。
(1) When an aluminum plate and a steel plate are joined together to produce an aluminum-coated steel plate, a zinc-based metal or a tin-based metal is applied to the joining surface of the aluminum plate in advance, and then the aluminum plate is pressure-welded to the steel plate. A method for manufacturing aluminum-coated steel sheets.
(2)アルミニウム板と鋼板とを互に接合し、アルミニ
ウム被覆鋼板を製造するにあたり、アルミニウム板と鋼
板の接合面夫々にあらかじめ亜鉛基金属または錫基金属
を付着せしめたのち、これらを圧接することを特徴とす
るアルミニウム被覆鋼板の製造方法。
(2) When joining an aluminum plate and a steel plate to each other to produce an aluminum-coated steel plate, a zinc-based metal or a tin-based metal is applied to each joining surface of the aluminum plate and the steel plate in advance, and then these are pressure-welded. A method for producing an aluminum-coated steel sheet, characterized by:
JP18858084A 1984-09-07 1984-09-07 Manufacture of aluminum covered steel sheet Pending JPS6167581A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18858084A JPS6167581A (en) 1984-09-07 1984-09-07 Manufacture of aluminum covered steel sheet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18858084A JPS6167581A (en) 1984-09-07 1984-09-07 Manufacture of aluminum covered steel sheet

Publications (1)

Publication Number Publication Date
JPS6167581A true JPS6167581A (en) 1986-04-07

Family

ID=16226162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18858084A Pending JPS6167581A (en) 1984-09-07 1984-09-07 Manufacture of aluminum covered steel sheet

Country Status (1)

Country Link
JP (1) JPS6167581A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006231343A (en) * 2005-02-22 2006-09-07 Nissan Motor Co Ltd Method and structure of joining oxide film forming material
WO2007139152A1 (en) * 2006-05-30 2007-12-06 Mitsubishi Heavy Industries, Ltd. Device by cold junction, process for manufacturing device, and cold junction apparatus
US8602289B2 (en) 2006-09-06 2013-12-10 Mitsubishi Heavy Industries, Ltd. Room temperature bonding using sputtering

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53102840A (en) * 1977-02-21 1978-09-07 Mitsubishi Heavy Ind Ltd Preliminarily treating method for diffusion welding of stainless steel, aluminum or aluminum alloy
JPS5847584A (en) * 1981-09-16 1983-03-19 Sumitomo Light Metal Ind Ltd Manufacture of steel-aluminum clad material

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53102840A (en) * 1977-02-21 1978-09-07 Mitsubishi Heavy Ind Ltd Preliminarily treating method for diffusion welding of stainless steel, aluminum or aluminum alloy
JPS5847584A (en) * 1981-09-16 1983-03-19 Sumitomo Light Metal Ind Ltd Manufacture of steel-aluminum clad material

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006231343A (en) * 2005-02-22 2006-09-07 Nissan Motor Co Ltd Method and structure of joining oxide film forming material
JP4656495B2 (en) * 2005-02-22 2011-03-23 日産自動車株式会社 Joining method and joining structure of oxide film forming material
WO2007139152A1 (en) * 2006-05-30 2007-12-06 Mitsubishi Heavy Industries, Ltd. Device by cold junction, process for manufacturing device, and cold junction apparatus
KR101101896B1 (en) * 2006-05-30 2012-01-02 내셔날 인스티튜트 오브 어드밴스드 인더스트리얼 사이언스 앤드 테크놀로지 Device by cold junction, process for manufacturing device, and cold junction apparatus
US10112376B2 (en) 2006-05-30 2018-10-30 Mitsubishi Heavy Industries Machine Tool, Co., Ltd. Device manufactured by room-temperature bonding, device manufacturing method, and room-temperature bonding apparatus
US8602289B2 (en) 2006-09-06 2013-12-10 Mitsubishi Heavy Industries, Ltd. Room temperature bonding using sputtering
US8608048B2 (en) 2006-09-06 2013-12-17 Mitsubishi Heavy Industries, Ltd. Room-temperature bonding method and room-temperature bonding apparatus including sputtering

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