JPS6166945U - - Google Patents
Info
- Publication number
- JPS6166945U JPS6166945U JP15244784U JP15244784U JPS6166945U JP S6166945 U JPS6166945 U JP S6166945U JP 15244784 U JP15244784 U JP 15244784U JP 15244784 U JP15244784 U JP 15244784U JP S6166945 U JPS6166945 U JP S6166945U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- side wall
- holding groove
- holding
- wafer carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 7
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15244784U JPS6166945U (ko) | 1984-10-09 | 1984-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15244784U JPS6166945U (ko) | 1984-10-09 | 1984-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6166945U true JPS6166945U (ko) | 1986-05-08 |
Family
ID=30710508
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15244784U Pending JPS6166945U (ko) | 1984-10-09 | 1984-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6166945U (ko) |
-
1984
- 1984-10-09 JP JP15244784U patent/JPS6166945U/ja active Pending