JPS6166350U - - Google Patents
Info
- Publication number
- JPS6166350U JPS6166350U JP1984149955U JP14995584U JPS6166350U JP S6166350 U JPS6166350 U JP S6166350U JP 1984149955 U JP1984149955 U JP 1984149955U JP 14995584 U JP14995584 U JP 14995584U JP S6166350 U JPS6166350 U JP S6166350U
- Authority
- JP
- Japan
- Prior art keywords
- compound vapor
- compound
- container
- mask repair
- repair device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149955U JPS646505Y2 (en:Method) | 1984-10-03 | 1984-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149955U JPS646505Y2 (en:Method) | 1984-10-03 | 1984-10-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6166350U true JPS6166350U (en:Method) | 1986-05-07 |
| JPS646505Y2 JPS646505Y2 (en:Method) | 1989-02-20 |
Family
ID=30708119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984149955U Expired JPS646505Y2 (en:Method) | 1984-10-03 | 1984-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS646505Y2 (en:Method) |
-
1984
- 1984-10-03 JP JP1984149955U patent/JPS646505Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS646505Y2 (en:Method) | 1989-02-20 |