JPS6165745U - - Google Patents
Info
- Publication number
- JPS6165745U JPS6165745U JP15046284U JP15046284U JPS6165745U JP S6165745 U JPS6165745 U JP S6165745U JP 15046284 U JP15046284 U JP 15046284U JP 15046284 U JP15046284 U JP 15046284U JP S6165745 U JPS6165745 U JP S6165745U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wide
- boat
- shaped
- storage boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 4
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15046284U JPH069515Y2 (ja) | 1984-10-03 | 1984-10-03 | ウエハの収納ボ−ト |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15046284U JPH069515Y2 (ja) | 1984-10-03 | 1984-10-03 | ウエハの収納ボ−ト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6165745U true JPS6165745U (enExample) | 1986-05-06 |
| JPH069515Y2 JPH069515Y2 (ja) | 1994-03-09 |
Family
ID=30708609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15046284U Expired - Lifetime JPH069515Y2 (ja) | 1984-10-03 | 1984-10-03 | ウエハの収納ボ−ト |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069515Y2 (enExample) |
-
1984
- 1984-10-03 JP JP15046284U patent/JPH069515Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH069515Y2 (ja) | 1994-03-09 |