JPS6165745U - - Google Patents

Info

Publication number
JPS6165745U
JPS6165745U JP15046284U JP15046284U JPS6165745U JP S6165745 U JPS6165745 U JP S6165745U JP 15046284 U JP15046284 U JP 15046284U JP 15046284 U JP15046284 U JP 15046284U JP S6165745 U JPS6165745 U JP S6165745U
Authority
JP
Japan
Prior art keywords
wafer
wide
boat
shaped
storage boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15046284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH069515Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15046284U priority Critical patent/JPH069515Y2/ja
Publication of JPS6165745U publication Critical patent/JPS6165745U/ja
Application granted granted Critical
Publication of JPH069515Y2 publication Critical patent/JPH069515Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP15046284U 1984-10-03 1984-10-03 ウエハの収納ボ−ト Expired - Lifetime JPH069515Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15046284U JPH069515Y2 (ja) 1984-10-03 1984-10-03 ウエハの収納ボ−ト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15046284U JPH069515Y2 (ja) 1984-10-03 1984-10-03 ウエハの収納ボ−ト

Publications (2)

Publication Number Publication Date
JPS6165745U true JPS6165745U (enrdf_load_stackoverflow) 1986-05-06
JPH069515Y2 JPH069515Y2 (ja) 1994-03-09

Family

ID=30708609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15046284U Expired - Lifetime JPH069515Y2 (ja) 1984-10-03 1984-10-03 ウエハの収納ボ−ト

Country Status (1)

Country Link
JP (1) JPH069515Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH069515Y2 (ja) 1994-03-09

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