JPS6165742U - - Google Patents
Info
- Publication number
- JPS6165742U JPS6165742U JP14987284U JP14987284U JPS6165742U JP S6165742 U JPS6165742 U JP S6165742U JP 14987284 U JP14987284 U JP 14987284U JP 14987284 U JP14987284 U JP 14987284U JP S6165742 U JPS6165742 U JP S6165742U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holder
- vapor deposition
- chemical vapor
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 9
- 239000004065 semiconductor Substances 0.000 claims 5
- 238000005229 chemical vapour deposition Methods 0.000 claims 4
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14987284U JPS6165742U (cs) | 1984-10-03 | 1984-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14987284U JPS6165742U (cs) | 1984-10-03 | 1984-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6165742U true JPS6165742U (cs) | 1986-05-06 |
Family
ID=30708039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14987284U Pending JPS6165742U (cs) | 1984-10-03 | 1984-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6165742U (cs) |
-
1984
- 1984-10-03 JP JP14987284U patent/JPS6165742U/ja active Pending
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