JPS6165455U - - Google Patents
Info
- Publication number
- JPS6165455U JPS6165455U JP1984149861U JP14986184U JPS6165455U JP S6165455 U JPS6165455 U JP S6165455U JP 1984149861 U JP1984149861 U JP 1984149861U JP 14986184 U JP14986184 U JP 14986184U JP S6165455 U JPS6165455 U JP S6165455U
- Authority
- JP
- Japan
- Prior art keywords
- photomask substrate
- vertex
- utility
- rectangular shape
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149861U JPS6165455U (th) | 1984-10-02 | 1984-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984149861U JPS6165455U (th) | 1984-10-02 | 1984-10-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6165455U true JPS6165455U (th) | 1986-05-06 |
Family
ID=30708028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984149861U Pending JPS6165455U (th) | 1984-10-02 | 1984-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6165455U (th) |
-
1984
- 1984-10-02 JP JP1984149861U patent/JPS6165455U/ja active Pending