JPS6165454U - - Google Patents

Info

Publication number
JPS6165454U
JPS6165454U JP1984149857U JP14985784U JPS6165454U JP S6165454 U JPS6165454 U JP S6165454U JP 1984149857 U JP1984149857 U JP 1984149857U JP 14985784 U JP14985784 U JP 14985784U JP S6165454 U JPS6165454 U JP S6165454U
Authority
JP
Japan
Prior art keywords
photomask substrate
vertex
finger
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984149857U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984149857U priority Critical patent/JPS6165454U/ja
Publication of JPS6165454U publication Critical patent/JPS6165454U/ja
Pending legal-status Critical Current

Links

JP1984149857U 1984-10-02 1984-10-02 Pending JPS6165454U (US20030204162A1-20031030-M00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984149857U JPS6165454U (US20030204162A1-20031030-M00001.png) 1984-10-02 1984-10-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984149857U JPS6165454U (US20030204162A1-20031030-M00001.png) 1984-10-02 1984-10-02

Publications (1)

Publication Number Publication Date
JPS6165454U true JPS6165454U (US20030204162A1-20031030-M00001.png) 1986-05-06

Family

ID=30708024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984149857U Pending JPS6165454U (US20030204162A1-20031030-M00001.png) 1984-10-02 1984-10-02

Country Status (1)

Country Link
JP (1) JPS6165454U (US20030204162A1-20031030-M00001.png)

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