JPS616538B2 - - Google Patents

Info

Publication number
JPS616538B2
JPS616538B2 JP4921877A JP4921877A JPS616538B2 JP S616538 B2 JPS616538 B2 JP S616538B2 JP 4921877 A JP4921877 A JP 4921877A JP 4921877 A JP4921877 A JP 4921877A JP S616538 B2 JPS616538 B2 JP S616538B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4921877A
Other languages
Japanese (ja)
Other versions
JPS53133370A (en
Inventor
Tadahiro Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP4921877A priority Critical patent/JPS53133370A/ja
Publication of JPS53133370A publication Critical patent/JPS53133370A/ja
Publication of JPS616538B2 publication Critical patent/JPS616538B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP4921877A 1977-04-27 1977-04-27 Manufacture of semiconductor device Granted JPS53133370A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4921877A JPS53133370A (en) 1977-04-27 1977-04-27 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4921877A JPS53133370A (en) 1977-04-27 1977-04-27 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS53133370A JPS53133370A (en) 1978-11-21
JPS616538B2 true JPS616538B2 (enExample) 1986-02-27

Family

ID=12824801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4921877A Granted JPS53133370A (en) 1977-04-27 1977-04-27 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53133370A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163545U (enExample) * 1986-04-08 1987-10-17

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163545U (enExample) * 1986-04-08 1987-10-17

Also Published As

Publication number Publication date
JPS53133370A (en) 1978-11-21

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