JPS6164326U - - Google Patents
Info
- Publication number
- JPS6164326U JPS6164326U JP14920484U JP14920484U JPS6164326U JP S6164326 U JPS6164326 U JP S6164326U JP 14920484 U JP14920484 U JP 14920484U JP 14920484 U JP14920484 U JP 14920484U JP S6164326 U JPS6164326 U JP S6164326U
- Authority
- JP
- Japan
- Prior art keywords
- gutter
- vapor deposition
- substance recovery
- deposition plate
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011084 recovery Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Description
第１図は本考案の物質の回収装置の実施例を示
す側面図、第２図は第１図の−矢視図である
。
１は真空容器、４は蒸発炉、５は蒸着板、６は
加熱機構、７は樋状板、９は回収容器、１０は移
送用配管を示す。
FIG. 1 is a side view showing an embodiment of the substance recovery device of the present invention, and FIG. 2 is a view taken along the - arrow in FIG. 1 is a vacuum container, 4 is an evaporation furnace, 5 is a vapor deposition plate, 6 is a heating mechanism, 7 is a gutter-like plate, 9 is a recovery container, and 10 is a transfer pipe.
Claims (1)
内面が左右方向へ下り傾斜となる断面山型をなし
且つ加熱機構を装備させた蒸着板を設け、且つ上
記蒸着板の左右両端縁の下方に、左右別個の樋状
板を配設し、各樋状板を流路を介して物質回収容
器に連結してなることを特徴とする物質の回収装
置。 Directly above the evaporation furnace installed in the vacuum container,
A vapor deposition plate having a mountain-shaped cross section with an inner surface sloping downward in the left and right direction and equipped with a heating mechanism is provided, and separate left and right gutter-like plates are disposed below both left and right edges of the vapor deposition plate, and each A substance recovery device comprising a gutter-like plate connected to a substance recovery container via a channel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14920484U JPS6164326U (en) | 1984-10-02 | 1984-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14920484U JPS6164326U (en) | 1984-10-02 | 1984-10-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6164326U true JPS6164326U (en) | 1986-05-01 |
Family
ID=30707392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14920484U Pending JPS6164326U (en) | 1984-10-02 | 1984-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6164326U (en) |
-
1984
- 1984-10-02 JP JP14920484U patent/JPS6164326U/ja active Pending
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