JPS6164326U - - Google Patents

Info

Publication number
JPS6164326U
JPS6164326U JP14920484U JP14920484U JPS6164326U JP S6164326 U JPS6164326 U JP S6164326U JP 14920484 U JP14920484 U JP 14920484U JP 14920484 U JP14920484 U JP 14920484U JP S6164326 U JPS6164326 U JP S6164326U
Authority
JP
Japan
Prior art keywords
gutter
vapor deposition
substance recovery
deposition plate
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14920484U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14920484U priority Critical patent/JPS6164326U/ja
Publication of JPS6164326U publication Critical patent/JPS6164326U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP14920484U 1984-10-02 1984-10-02 Pending JPS6164326U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14920484U JPS6164326U (US20100056889A1-20100304-C00004.png) 1984-10-02 1984-10-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14920484U JPS6164326U (US20100056889A1-20100304-C00004.png) 1984-10-02 1984-10-02

Publications (1)

Publication Number Publication Date
JPS6164326U true JPS6164326U (US20100056889A1-20100304-C00004.png) 1986-05-01

Family

ID=30707392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14920484U Pending JPS6164326U (US20100056889A1-20100304-C00004.png) 1984-10-02 1984-10-02

Country Status (1)

Country Link
JP (1) JPS6164326U (US20100056889A1-20100304-C00004.png)

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