JPS6164311U - - Google Patents
Info
- Publication number
- JPS6164311U JPS6164311U JP14908784U JP14908784U JPS6164311U JP S6164311 U JPS6164311 U JP S6164311U JP 14908784 U JP14908784 U JP 14908784U JP 14908784 U JP14908784 U JP 14908784U JP S6164311 U JPS6164311 U JP S6164311U
- Authority
- JP
- Japan
- Prior art keywords
- side chamber
- flow path
- pressure gauge
- filter
- interposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012790 confirmation Methods 0.000 claims description 4
- 210000002445 nipple Anatomy 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14908784U JPS6164311U (es) | 1984-10-03 | 1984-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14908784U JPS6164311U (es) | 1984-10-03 | 1984-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6164311U true JPS6164311U (es) | 1986-05-01 |
Family
ID=30707278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14908784U Pending JPS6164311U (es) | 1984-10-03 | 1984-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6164311U (es) |
-
1984
- 1984-10-03 JP JP14908784U patent/JPS6164311U/ja active Pending