JPS6163499U - - Google Patents
Info
- Publication number
- JPS6163499U JPS6163499U JP14850084U JP14850084U JPS6163499U JP S6163499 U JPS6163499 U JP S6163499U JP 14850084 U JP14850084 U JP 14850084U JP 14850084 U JP14850084 U JP 14850084U JP S6163499 U JPS6163499 U JP S6163499U
- Authority
- JP
- Japan
- Prior art keywords
- cooling water
- vacuum pump
- oil
- water coil
- solenoid valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000498 cooling water Substances 0.000 claims description 5
- 238000009792 diffusion process Methods 0.000 claims description 2
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図は本考案の１実施例を示す略示的縦断面
図、第２図は従来の油拡散型真空ポンプを示す略
示的縦断面図である。 油溜……２、油加熱ヒータ……３、冷却水コイ
ル……９、冷却水管……１０、電磁弁……１１。
図、第２図は従来の油拡散型真空ポンプを示す略
示的縦断面図である。 油溜……２、油加熱ヒータ……３、冷却水コイ
ル……９、冷却水管……１０、電磁弁……１１。
Claims (1)
- 真空ポンプ本体の油溜及び油加熱ヒータの周囲
に冷却水コイルを設け、該冷却水コイルに接続さ
れた冷却水管に電源が遮断されたとき開となる電
磁弁を介装したことを特徴とする油拡散型真空ポ
ンプ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14850084U JPS6163499U (ja) | 1984-10-02 | 1984-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14850084U JPS6163499U (ja) | 1984-10-02 | 1984-10-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6163499U true JPS6163499U (ja) | 1986-04-30 |
Family
ID=30706708
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14850084U Pending JPS6163499U (ja) | 1984-10-02 | 1984-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6163499U (ja) |
-
1984
- 1984-10-02 JP JP14850084U patent/JPS6163499U/ja active Pending