JPS6163141U - - Google Patents
Info
- Publication number
- JPS6163141U JPS6163141U JP14780584U JP14780584U JPS6163141U JP S6163141 U JPS6163141 U JP S6163141U JP 14780584 U JP14780584 U JP 14780584U JP 14780584 U JP14780584 U JP 14780584U JP S6163141 U JPS6163141 U JP S6163141U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- gas
- movable shaft
- wall surface
- gas chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims 9
- 238000007789 sealing Methods 0.000 claims 3
- 239000003566 sealing material Substances 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 1
- 229910001873 dinitrogen Inorganic materials 0.000 claims 1
- 239000001307 helium Substances 0.000 claims 1
- 229910052734 helium Inorganic materials 0.000 claims 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
Landscapes
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14780584U JPH0325157Y2 (en:Method) | 1984-09-29 | 1984-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14780584U JPH0325157Y2 (en:Method) | 1984-09-29 | 1984-09-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6163141U true JPS6163141U (en:Method) | 1986-04-28 |
| JPH0325157Y2 JPH0325157Y2 (en:Method) | 1991-05-31 |
Family
ID=30706032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14780584U Expired JPH0325157Y2 (en:Method) | 1984-09-29 | 1984-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325157Y2 (en:Method) |
-
1984
- 1984-09-29 JP JP14780584U patent/JPH0325157Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0325157Y2 (en:Method) | 1991-05-31 |