JPS6163141U - - Google Patents

Info

Publication number
JPS6163141U
JPS6163141U JP14780584U JP14780584U JPS6163141U JP S6163141 U JPS6163141 U JP S6163141U JP 14780584 U JP14780584 U JP 14780584U JP 14780584 U JP14780584 U JP 14780584U JP S6163141 U JPS6163141 U JP S6163141U
Authority
JP
Japan
Prior art keywords
chamber
gas
movable shaft
wall surface
gas chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14780584U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0325157Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14780584U priority Critical patent/JPH0325157Y2/ja
Publication of JPS6163141U publication Critical patent/JPS6163141U/ja
Application granted granted Critical
Publication of JPH0325157Y2 publication Critical patent/JPH0325157Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
JP14780584U 1984-09-29 1984-09-29 Expired JPH0325157Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14780584U JPH0325157Y2 (cg-RX-API-DMAC7.html) 1984-09-29 1984-09-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14780584U JPH0325157Y2 (cg-RX-API-DMAC7.html) 1984-09-29 1984-09-29

Publications (2)

Publication Number Publication Date
JPS6163141U true JPS6163141U (cg-RX-API-DMAC7.html) 1986-04-28
JPH0325157Y2 JPH0325157Y2 (cg-RX-API-DMAC7.html) 1991-05-31

Family

ID=30706032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14780584U Expired JPH0325157Y2 (cg-RX-API-DMAC7.html) 1984-09-29 1984-09-29

Country Status (1)

Country Link
JP (1) JPH0325157Y2 (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH0325157Y2 (cg-RX-API-DMAC7.html) 1991-05-31

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