JPS6163016U - - Google Patents

Info

Publication number
JPS6163016U
JPS6163016U JP14770484U JP14770484U JPS6163016U JP S6163016 U JPS6163016 U JP S6163016U JP 14770484 U JP14770484 U JP 14770484U JP 14770484 U JP14770484 U JP 14770484U JP S6163016 U JPS6163016 U JP S6163016U
Authority
JP
Japan
Prior art keywords
chamber
rotating body
bearings
bearing device
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14770484U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14770484U priority Critical patent/JPS6163016U/ja
Publication of JPS6163016U publication Critical patent/JPS6163016U/ja
Pending legal-status Critical Current

Links

JP14770484U 1984-09-29 1984-09-29 Pending JPS6163016U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14770484U JPS6163016U (ko) 1984-09-29 1984-09-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14770484U JPS6163016U (ko) 1984-09-29 1984-09-29

Publications (1)

Publication Number Publication Date
JPS6163016U true JPS6163016U (ko) 1986-04-28

Family

ID=30705932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14770484U Pending JPS6163016U (ko) 1984-09-29 1984-09-29

Country Status (1)

Country Link
JP (1) JPS6163016U (ko)

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