JPS6161701A - Method of manufacturing rotary polygonal mirror - Google Patents
Method of manufacturing rotary polygonal mirrorInfo
- Publication number
- JPS6161701A JPS6161701A JP18049584A JP18049584A JPS6161701A JP S6161701 A JPS6161701 A JP S6161701A JP 18049584 A JP18049584 A JP 18049584A JP 18049584 A JP18049584 A JP 18049584A JP S6161701 A JPS6161701 A JP S6161701A
- Authority
- JP
- Japan
- Prior art keywords
- cutting
- base material
- cut
- diamond
- tool holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Elements Other Than Lenses (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Turning (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、レーザー走査系光学装置等に用いられる回転
多面鏡の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a rotating polygon mirror used in a laser scanning optical device or the like.
レーザー走査系光学装置などに装着され、例えばレーザ
ービームの進路を変換させて、レーザービームを受光面
上を走査させるのに用いる回転多面鏡としては1代表的
には断面が正六角形状などの正多角形からなる角柱部材
の側面を反射鏡面として設けたものが知られている。A rotating polygon mirror that is attached to a laser scanning optical device and used, for example, to change the course of a laser beam and scan the laser beam on a light-receiving surface, is typically a polygon mirror with a regular hexagonal cross section. It is known that the side surfaces of a polygonal prism member are provided as reflective mirror surfaces.
従来、このような回転多面鏡の製造は、アルミニウム合
金等の金属材料からなる部材を断面が正多角形状である
角柱状に成形した基材3の所定部分4を、第2図(a)
に示すようなダイヤモンドRバイト1、すなわちダイヤ
モンド刃が曲線状に形成されたバイトを用いて、第2図
(b)または第2図(C)に示すようないわゆるフライ
カー/ ト方式による切削工程により、超精密切削して
反射鏡面を形成する方法等によって製造されてきた。Conventionally, in the manufacture of such a rotating polygon mirror, a predetermined portion 4 of a base material 3 made of a member made of a metal material such as an aluminum alloy and formed into a prismatic shape with a regular polygonal cross section is prepared as shown in FIG. 2(a).
Using a diamond R cutting tool 1 as shown in FIG. , ultra-precision cutting to form a reflective mirror surface, etc.
ところが、このダイヤモンドRバイトを用いた超精密切
削工程に於いては、第2図(d)の第2図(b)の工程
によって切削された面10の、及び第2図(e)の第2
図(C)の工程によって切削された面11の平面図とし
てそれぞれ示したように、切削面にバイトの送り方向へ
の切削条痕12が残り易く、この切削条912に起因し
て生じた回折光が、反射鏡面の反射効率を低下させるな
どの問題があった。However, in the ultra-precision cutting process using this diamond R cutting tool, the surface 10 cut by the process of FIG. 2(d), FIG. 2(b), and the surface 10 of FIG. 2
As shown in the plan view of the surface 11 cut by the process in FIG. There were problems such as the light reducing the reflection efficiency of the reflecting mirror surface.
また、反射鏡面に所定の表面粗さを与えるためには、バ
イトの加工面内での送り速度をある程度低くする必要が
あり、切削加工時間が長く、加工能率が低いと言う問題
もあった。In addition, in order to give the reflective mirror surface a predetermined surface roughness, it is necessary to lower the feed rate of the cutting tool within the processing surface to a certain extent, resulting in a problem of long cutting time and low processing efficiency.
本発明の目的は、基材面を超精密切削する工程に於いて
、切削加工された面に切削条痕を残さずに基材面を切削
し、かつ加工能率を向上することのできる回転多面鏡の
製造方法を提供することにある。An object of the present invention is to provide a rotary multi-face that can cut the base material surface without leaving cutting marks on the cut surface and improve machining efficiency in the process of ultra-precision cutting of the base material surface. The purpose of this invention is to provide a method for manufacturing a mirror.
上記の目的は以下の本発明によって達成することができ
る。The above objects can be achieved by the following invention.
すなわち、本発明の回転多面鏡の製造方法は、基材面を
超精密切削することによって、反射鏡面を形成する工程
を含む回転多面鏡の製造方法に於いて、前記基材面のa
精密切削をダイヤモンド直線刃を用いて実施することを
特徴とする。That is, the method for manufacturing a rotating polygon mirror of the present invention includes the step of forming a reflecting mirror surface by ultra-precision cutting the substrate surface.
It is characterized by precision cutting using a diamond straight blade.
以下1図面を用いて本発明の方法を更に詳細に説明する
。The method of the present invention will be explained in more detail below using one drawing.
第1図(a)及び第1図(b)は、それぞれ本発明の方
法に用いるダイヤモンド直線刃の正面図及び側面図であ
り、15は直線状に伸びた刃の部分を有する直線状にダ
イヤモンド直線刃であり、シャンク2によって固定され
ている。なお、本発明の方法に用いられるダイヤモンド
直線刃は、切削工程後に形成された切削面に所定の平面
度を与えることのできる程度の直線性を有するものを使
用する。1(a) and 1(b) are a front view and a side view, respectively, of a straight diamond blade used in the method of the present invention, and 15 is a straight diamond blade having a straight edge portion. It is a straight blade and is fixed by a shank 2. Note that the diamond straight blade used in the method of the present invention is one that has a degree of straightness that can give a predetermined flatness to the cut surface formed after the cutting process.
本発明の方法に於いては、このようなダイヤモンド直線
刃を用いて、基材面の超精密切削が実施される。In the method of the present invention, ultra-precision cutting of the substrate surface is performed using such a diamond straight blade.
すなわち、第1図(C)に示すように、ダイヤモンド直
線刃15が固定されたシャンク2を、回転軸14を中心
に、8で示された方向に回転駆動可能な)<イトホルダ
ー7に固定し、更に多数の反射鏡面を形成する面を有す
る基材3を、多数面割出し機構6がセットされた雇5に
取り付ける。ここで、基材3の有する側面4のうちの1
つを、切削位置に移動させ、そこに停止させる。次に、
バイトホルダー7を所定の速度で回転させながら、13
の方向に所定の速度で移動させ、加工すべき基材面4に
ダイヤモンド直線刃を当て、引続き13の方向に所定の
速度でバイトホルダー7を移動させ切削を実施する。That is, as shown in FIG. 1(C), the shank 2 to which the diamond straight blade 15 is fixed is fixed to the tool holder 7, which can be rotated in the direction indicated by 8 around the rotating shaft 14. Then, a base material 3 having a surface forming a large number of reflecting mirror surfaces is attached to a support 5 in which a multi-face indexing mechanism 6 is set. Here, one of the side surfaces 4 of the base material 3
one is moved to the cutting position and stopped there. next,
13 while rotating the tool holder 7 at a predetermined speed.
The cutting tool holder 7 is moved at a predetermined speed in the direction of 13 to apply the diamond straight blade to the surface 4 of the base material to be processed, and then the tool holder 7 is moved at a predetermined speed in the direction of 13 to perform cutting.
所定の取代分切削が行なわれたら、バイトホルダーの移
動を停止し、バイトホルダー7を13の逆方向に後退さ
せたところで、割出し機構6により、基材を回転させ、
切削加工終了面を切削位置から移動させ、切削加工すべ
き新たな基材面を切削位置に移動させ、そこの停止させ
、前記した工程を再び繰り返して、切削を行なう。Once the predetermined machining allowance has been cut, the movement of the cutting tool holder is stopped, and the cutting tool holder 7 is moved back in the opposite direction of 13, and the indexing mechanism 6 rotates the base material.
The cutting finished surface is moved from the cutting position, the new base material surface to be cut is moved to the cutting position, stopped there, and the above steps are repeated again to perform cutting.
更に、以上の工程を反射鏡面の数に応じて繰返し、切削
工程を終了する。Further, the above steps are repeated according to the number of reflecting mirror surfaces, and the cutting step is completed.
このような本発明の方法に於けるようなダイヤモンド直
線刃を用いた超精密切削により反射鏡面の形成を実施す
れば、従来のダイヤモンl” Rバイトを用いて超精密
切削を実施した場合のよう1・よ切削条痕を切削面に生
じさせることなく反射鏡面の形成が可能であり、すjI
′;ワ条朕に起因して生じる入;」折尤による反射鏡1
力反射効率の低下を起すことのない反射鏡面を形成する
ことが可能となり、また、従来のダイヤモンドバイトを
用いた場合のように、加工面内でのバイトの送り操作を
必要としないために、切削加工に要する時間を大幅に短
縮することが可能となり、加工能率を向上させることが
できた。If a reflective mirror surface is formed by ultra-precision cutting using a diamond straight blade as in the method of the present invention, it will be similar to the case when ultra-precision cutting is performed using a conventional diamond l''R cutting tool. 1. It is possible to form a reflective mirror surface without creating cutting marks on the cut surface.
′;Input caused by the warp point;”Reflector 1 due to folding
It is possible to form a reflective mirror surface that does not cause a decrease in force reflection efficiency, and there is no need to feed the tool within the processing surface, unlike when using a conventional diamond tool. It became possible to significantly shorten the time required for cutting and improve machining efficiency.
以下、実施例を用いて本発明の方法を更に詳細に説明す
る。Hereinafter, the method of the present invention will be explained in more detail using Examples.
実施例
正六角柱形状のアルミニウムからなる基材の反射鏡面を
形成すべき面を刃巾10mm、直線仕入/20のダイヤ
モンドバイトにて切削することにより表面粗さRmax
o、01p、平面度入75以下の鏡面が得られた。また
、この鏡面は切削条痕がない為、フレアーを生じなかっ
た。又、巾5mmの回転多面鏡を切削により形成する際
、従来の送り方式の加工の場合の3000rpm 、
0.01mm/revの送りの場合に比べて、本発明の
方法により直線刃を用い1−/reマ(二て50岬の取
り代を取った場合は、正味加工時間は一面当り約1/1
0になり加工能率が向上した。Example A surface roughness Rmax was obtained by cutting the surface on which a reflective mirror surface of a regular hexagonal prism-shaped aluminum base material was to be formed with a diamond tool with a blade width of 10 mm and a straight line cut/20.
A mirror surface with a flatness of 75 or less was obtained. Furthermore, since this mirror surface had no cutting marks, no flare occurred. In addition, when forming a rotating polygon mirror with a width of 5 mm by cutting, the speed of 3000 rpm in the case of conventional feeding method processing,
Compared to the case of a feed of 0.01 mm/rev, when using the method of the present invention with a straight blade and taking a machining allowance of 1-/re machining (2.5 mm/rev), the net machining time is approximately 1/rev per surface. 1
0, improving machining efficiency.
i 1 [ffl (a)はバイトシャンクに固定され
た本発明の方法に用いるダイヤモンド直線刃の正面図、
第1図(b)はバイトシャンクに固定された*、発明の
方法に用いるダイヤモンド直線刃の側面図、第1図(c
)は、本発明の方法に於ける超精密切削工程を説明する
だめの装置の概略図、第2図(a)はダイヤモンド直線
刃トの正面図及び側面図、第2図(b)及び第2図(C
)は従来の方法に於ける超精密切削工程を説明するため
の装置の概略図、第2図(d)及び第2図(e)は従来
の方法によって切削された切削面の模式図である。
1、ダイヤモンドRノへイト
2:/へイトシャンク
3:基材
4、切削面
5・雇
6:多数面割出し機構
7:バイトホルダー
8:回転方向
9.13:移動方向
10.11:切削面
12:条痕
14:回転軸
15:ダイヤモンド直線刃
(a) (b)
第 1 図
(a)
(b) (c)
ム
(d) (e)
第 2 図i 1 [ffl (a) is a front view of the diamond straight blade used in the method of the present invention fixed to the bite shank;
Figure 1(b) is a side view of the diamond straight blade used in the method of the invention fixed to the bit shank, and Figure 1(c)
) is a schematic diagram of a device for explaining the ultra-precision cutting process in the method of the present invention, FIG. 2(a) is a front view and side view of a diamond straight blade, FIG. 2(b) and Figure 2 (C
) is a schematic diagram of an apparatus for explaining the ultra-precision cutting process in the conventional method, and FIGS. 2(d) and 2(e) are schematic diagrams of the cut surface cut by the conventional method. . 1. Diamond R Nohite 2: / Hate Shank 3: Base material 4, Cutting surface 5/Holder 6: Multi-face indexing mechanism 7: Tool holder 8: Rotation direction 9.13: Movement direction 10.11: Cutting surface 12: Screw 14: Rotating shaft 15: Diamond straight blade (a) (b) Fig. 1 (a) (b) (c) Mu (d) (e) Fig. 2
Claims (1)
形成する工程を含む回転多面鏡の製造方法に於いて、前
記基材面の超精密切削をダイヤモンド直線刃を用いて実
施することを特徴とする回転多面鏡の製造方法。1) In a method for manufacturing a rotating polygon mirror including a step of forming a reflecting mirror surface by ultra-precision cutting the base material surface, the ultra-precision cutting of the base material surface is performed using a diamond straight blade. A manufacturing method for a rotating polygon mirror.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18049584A JPS6161701A (en) | 1984-08-31 | 1984-08-31 | Method of manufacturing rotary polygonal mirror |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18049584A JPS6161701A (en) | 1984-08-31 | 1984-08-31 | Method of manufacturing rotary polygonal mirror |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6161701A true JPS6161701A (en) | 1986-03-29 |
Family
ID=16084237
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18049584A Pending JPS6161701A (en) | 1984-08-31 | 1984-08-31 | Method of manufacturing rotary polygonal mirror |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6161701A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006330141A (en) * | 2005-05-24 | 2006-12-07 | Olympus Corp | Optical element, and optical system and electronic apparatus using same |
JP2008216512A (en) * | 2007-03-02 | 2008-09-18 | Ricoh Co Ltd | Optical scan apparatus, image formation apparatus and optical deflector manufacturing method |
-
1984
- 1984-08-31 JP JP18049584A patent/JPS6161701A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006330141A (en) * | 2005-05-24 | 2006-12-07 | Olympus Corp | Optical element, and optical system and electronic apparatus using same |
JP2008216512A (en) * | 2007-03-02 | 2008-09-18 | Ricoh Co Ltd | Optical scan apparatus, image formation apparatus and optical deflector manufacturing method |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6032869B2 (en) | Blaze diffraction grating | |
JP2003183040A (en) | Point cutter, method of use and apparatus | |
CN111375900A (en) | Complex-profile cutter laser processing method based on three-dimensional shaping focal spot | |
JP5478296B2 (en) | Fresnel lens, Fresnel lens mold, Fresnel lens manufacturing method, and Fresnel lens mold manufacturing method | |
JP4878517B2 (en) | Diamond tools | |
CN113967852A (en) | Metal multi-surface reflecting prism processing device and method | |
JPS6161701A (en) | Method of manufacturing rotary polygonal mirror | |
JPH1043903A (en) | Super precision cutting method for crystal material | |
JP3496157B2 (en) | Polygon mirror manufacturing method | |
JPH06170629A (en) | Chamfering tool | |
JPH09239603A (en) | Groove cutting method | |
JP2006289871A (en) | Method for manufacturing ring zone optical element and method for manufacturing mold for ring zone optical element | |
JPH07124813A (en) | Forming method of fresnel shape | |
JP2004017216A (en) | Diamond blade and mirror surface machining method | |
JPS59232702A (en) | Diamond cutting tool | |
JPH06269B2 (en) | How to cut board | |
JP2004188511A (en) | Method of fine groove working, workpiece with fine grooves, and molding | |
EP0557057A1 (en) | Tool for use in the manufacture of binary optical elements | |
JP2686814B2 (en) | Tool core height adjustment method | |
JP2005144657A (en) | Monocrystal diamond end mill and cutting method of hard fragile material | |
JP2006043805A (en) | Cutting tool, a method of forming two or more cylindrical projection using the cutting tool and support having the cylindrical projections | |
JP2000198001A (en) | Cutting tool and cutting work method | |
JPS62102901A (en) | Manufacture of optical parts | |
JP2006088313A (en) | Gear formation cutter | |
JPH0288103A (en) | Machining method of fine groove |