JPS6161073U - - Google Patents

Info

Publication number
JPS6161073U
JPS6161073U JP14496584U JP14496584U JPS6161073U JP S6161073 U JPS6161073 U JP S6161073U JP 14496584 U JP14496584 U JP 14496584U JP 14496584 U JP14496584 U JP 14496584U JP S6161073 U JPS6161073 U JP S6161073U
Authority
JP
Japan
Prior art keywords
side wall
vertical side
coating
mounting table
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14496584U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14496584U priority Critical patent/JPS6161073U/ja
Publication of JPS6161073U publication Critical patent/JPS6161073U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP14496584U 1984-09-27 1984-09-27 Pending JPS6161073U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14496584U JPS6161073U (enrdf_load_stackoverflow) 1984-09-27 1984-09-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14496584U JPS6161073U (enrdf_load_stackoverflow) 1984-09-27 1984-09-27

Publications (1)

Publication Number Publication Date
JPS6161073U true JPS6161073U (enrdf_load_stackoverflow) 1986-04-24

Family

ID=30703225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14496584U Pending JPS6161073U (enrdf_load_stackoverflow) 1984-09-27 1984-09-27

Country Status (1)

Country Link
JP (1) JPS6161073U (enrdf_load_stackoverflow)

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