JPS6161070U - - Google Patents
Info
- Publication number
- JPS6161070U JPS6161070U JP14455584U JP14455584U JPS6161070U JP S6161070 U JPS6161070 U JP S6161070U JP 14455584 U JP14455584 U JP 14455584U JP 14455584 U JP14455584 U JP 14455584U JP S6161070 U JPS6161070 U JP S6161070U
- Authority
- JP
- Japan
- Prior art keywords
- original plate
- glass original
- partition wall
- spinner
- onto
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
- Manufacturing Optical Record Carriers (AREA)
Description
図は本考案の一実施例を示す断面図である。
１′…隔壁板、２…ガラス原板。
Claims (1)
- 高速で回転するガラス原板の中央にレジスト液
を滴下して上記ガラス原板上にレジスト液を塗布
するスピンナにおいて、上記ガラス原板上に円錐
状の隔壁を設け、該隔壁の頂部に気体の取入口を
設け、上記隔壁の周辺部と上記ガラス原板との間
に間隙を設けたスピンナ。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14455584U JPS6161070U (ja) | 1984-09-25 | 1984-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14455584U JPS6161070U (ja) | 1984-09-25 | 1984-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6161070U true JPS6161070U (ja) | 1986-04-24 |
Family
ID=30702829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14455584U Pending JPS6161070U (ja) | 1984-09-25 | 1984-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6161070U (ja) |
-
1984
- 1984-09-25 JP JP14455584U patent/JPS6161070U/ja active Pending