JPS6161069U - - Google Patents

Info

Publication number
JPS6161069U
JPS6161069U JP14219584U JP14219584U JPS6161069U JP S6161069 U JPS6161069 U JP S6161069U JP 14219584 U JP14219584 U JP 14219584U JP 14219584 U JP14219584 U JP 14219584U JP S6161069 U JPS6161069 U JP S6161069U
Authority
JP
Japan
Prior art keywords
coated
rotating head
supported
coating liquid
spin coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14219584U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14219584U priority Critical patent/JPS6161069U/ja
Publication of JPS6161069U publication Critical patent/JPS6161069U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP14219584U 1984-09-21 1984-09-21 Pending JPS6161069U (US20100223739A1-20100909-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14219584U JPS6161069U (US20100223739A1-20100909-C00005.png) 1984-09-21 1984-09-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14219584U JPS6161069U (US20100223739A1-20100909-C00005.png) 1984-09-21 1984-09-21

Publications (1)

Publication Number Publication Date
JPS6161069U true JPS6161069U (US20100223739A1-20100909-C00005.png) 1986-04-24

Family

ID=30700523

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14219584U Pending JPS6161069U (US20100223739A1-20100909-C00005.png) 1984-09-21 1984-09-21

Country Status (1)

Country Link
JP (1) JPS6161069U (US20100223739A1-20100909-C00005.png)

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