JPS6161068U - - Google Patents

Info

Publication number
JPS6161068U
JPS6161068U JP13063184U JP13063184U JPS6161068U JP S6161068 U JPS6161068 U JP S6161068U JP 13063184 U JP13063184 U JP 13063184U JP 13063184 U JP13063184 U JP 13063184U JP S6161068 U JPS6161068 U JP S6161068U
Authority
JP
Japan
Prior art keywords
workpiece
coating
turntable
detection means
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13063184U
Other languages
English (en)
Japanese (ja)
Other versions
JPS634542Y2 (pl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13063184U priority Critical patent/JPS634542Y2/ja
Publication of JPS6161068U publication Critical patent/JPS6161068U/ja
Application granted granted Critical
Publication of JPS634542Y2 publication Critical patent/JPS634542Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP13063184U 1984-08-30 1984-08-30 Expired JPS634542Y2 (pl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13063184U JPS634542Y2 (pl) 1984-08-30 1984-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13063184U JPS634542Y2 (pl) 1984-08-30 1984-08-30

Publications (2)

Publication Number Publication Date
JPS6161068U true JPS6161068U (pl) 1986-04-24
JPS634542Y2 JPS634542Y2 (pl) 1988-02-05

Family

ID=30689235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13063184U Expired JPS634542Y2 (pl) 1984-08-30 1984-08-30

Country Status (1)

Country Link
JP (1) JPS634542Y2 (pl)

Also Published As

Publication number Publication date
JPS634542Y2 (pl) 1988-02-05

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