JPS6161068U - - Google Patents

Info

Publication number
JPS6161068U
JPS6161068U JP13063184U JP13063184U JPS6161068U JP S6161068 U JPS6161068 U JP S6161068U JP 13063184 U JP13063184 U JP 13063184U JP 13063184 U JP13063184 U JP 13063184U JP S6161068 U JPS6161068 U JP S6161068U
Authority
JP
Japan
Prior art keywords
workpiece
coating
turntable
detection means
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13063184U
Other languages
English (en)
Japanese (ja)
Other versions
JPS634542Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13063184U priority Critical patent/JPS634542Y2/ja
Publication of JPS6161068U publication Critical patent/JPS6161068U/ja
Application granted granted Critical
Publication of JPS634542Y2 publication Critical patent/JPS634542Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP13063184U 1984-08-30 1984-08-30 Expired JPS634542Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13063184U JPS634542Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-08-30 1984-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13063184U JPS634542Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-08-30 1984-08-30

Publications (2)

Publication Number Publication Date
JPS6161068U true JPS6161068U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-04-24
JPS634542Y2 JPS634542Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-02-05

Family

ID=30689235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13063184U Expired JPS634542Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-08-30 1984-08-30

Country Status (1)

Country Link
JP (1) JPS634542Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS634542Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-02-05

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