JPS6159661U - - Google Patents

Info

Publication number

JPS6159661U

JPS6159661U JP14532084U JP14532084U JPS6159661U JP S6159661 U JPS6159661 U JP S6159661U JP 14532084 U JP14532084 U JP 14532084U JP 14532084 U JP14532084 U JP 14532084U JP S6159661 U JPS6159661 U JP S6159661U

Authority

JP

Japan

Prior art keywords

ion plating

type ion

resistance heating

evaporation source

heating evaporation

Prior art date

1984-09-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 230000007246 mechanism Effects 0.000 claims description 8
• 230000008020 evaporation Effects 0.000 claims description 7
• 238000001704 evaporation Methods 0.000 claims description 7
• 238000007733 ion plating Methods 0.000 claims description 7
• 238000010438 heat treatment Methods 0.000 claims description 4
• 230000002265 prevention Effects 0.000 claims description 2
• 238000007740 vapor deposition Methods 0.000 claims 1
• RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
• 238000005566 electron beam evaporation Methods 0.000 description 1
• 238000010894 electron beam technology Methods 0.000 description 1
• 239000010931 gold Substances 0.000 description 1
• 229910052737 gold Inorganic materials 0.000 description 1
• 229910052751 metal Inorganic materials 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1
• 239000010936 titanium Substances 0.000 description 1
• 229910052719 titanium Inorganic materials 0.000 description 1