JPS6158985U - - Google Patents

Info

Publication number
JPS6158985U
JPS6158985U JP14085784U JP14085784U JPS6158985U JP S6158985 U JPS6158985 U JP S6158985U JP 14085784 U JP14085784 U JP 14085784U JP 14085784 U JP14085784 U JP 14085784U JP S6158985 U JPS6158985 U JP S6158985U
Authority
JP
Japan
Prior art keywords
rotor
bonded together
molecular pump
diffusion bonding
stacking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14085784U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14085784U priority Critical patent/JPS6158985U/ja
Publication of JPS6158985U publication Critical patent/JPS6158985U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP14085784U 1984-09-19 1984-09-19 Pending JPS6158985U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14085784U JPS6158985U (enrdf_load_stackoverflow) 1984-09-19 1984-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14085784U JPS6158985U (enrdf_load_stackoverflow) 1984-09-19 1984-09-19

Publications (1)

Publication Number Publication Date
JPS6158985U true JPS6158985U (enrdf_load_stackoverflow) 1986-04-21

Family

ID=30699200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14085784U Pending JPS6158985U (enrdf_load_stackoverflow) 1984-09-19 1984-09-19

Country Status (1)

Country Link
JP (1) JPS6158985U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015062909A1 (de) * 2013-10-28 2015-05-07 Oerlikon Leybold Vacuum Gmbh Trägerelement für rohrelemente einer holweckstufe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015062909A1 (de) * 2013-10-28 2015-05-07 Oerlikon Leybold Vacuum Gmbh Trägerelement für rohrelemente einer holweckstufe

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