JPS6158786U - - Google Patents
Info
- Publication number
- JPS6158786U JPS6158786U JP14378584U JP14378584U JPS6158786U JP S6158786 U JPS6158786 U JP S6158786U JP 14378584 U JP14378584 U JP 14378584U JP 14378584 U JP14378584 U JP 14378584U JP S6158786 U JPS6158786 U JP S6158786U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- pipes
- gap
- fitted
- synthetic resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims description 2
- 229920003002 synthetic resin Polymers 0.000 claims description 2
- 239000000057 synthetic resin Substances 0.000 claims description 2
- 239000011261 inert gas Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
Landscapes
- Rigid Pipes And Flexible Pipes (AREA)
Description
図面は本考案の実施例を示すもので、第１図乃
至第３図は３種の例を示す一部の簡略断面図、第
４図及び第５図はコネクターを装着した状態の要
部の断面図である。
１……合成樹脂製内パイプ、２……金属製ベロ
ーパイプ、３……隙間、４，５……シール部。
The drawings show embodiments of the present invention, and FIGS. 1 to 3 are simplified sectional views of some of the three examples, and FIGS. 4 and 5 show main parts with the connector attached. FIG. 1...Synthetic resin inner pipe, 2...Metal bellows pipe, 3...Gap, 4, 5...Seal portion.
Claims (1)
１に金属製のベローパイプ２を適宜隙間３を存し
て被嵌して二重パイプを形成し、両パイプ１，２
の両端間をシール４，５すると共に両パイプ１，
２間の前記隙間３に不活性ガスを封入してなるフ
レキシブルパイプ。 A metal bellows pipe 2 is fitted onto a synthetic resin inner pipe 1 having flexibility and chemical resistance with an appropriate gap 3 to form a double pipe, and both pipes 1 and 2 are fitted.
Seals 4, 5 between both ends of the pipes 1,
A flexible pipe in which an inert gas is filled in the gap 3 between the two.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14378584U JPH025172Y2 (en) | 1984-09-21 | 1984-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14378584U JPH025172Y2 (en) | 1984-09-21 | 1984-09-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6158786U true JPS6158786U (en) | 1986-04-19 |
| JPH025172Y2 JPH025172Y2 (en) | 1990-02-07 |
Family
ID=30702074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14378584U Expired JPH025172Y2 (en) | 1984-09-21 | 1984-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH025172Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160113977A (en) * | 2015-03-23 | 2016-10-04 | 도쿄엘렉트론가부시키가이샤 | Thermal processing apparatus |
| JP7292775B1 (en) * | 2023-02-22 | 2023-06-19 | 株式会社昭和冷凍プラント | Installation method of insulation structure for refrigerant and multi-layer pipe for refrigerant |
-
1984
- 1984-09-21 JP JP14378584U patent/JPH025172Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160113977A (en) * | 2015-03-23 | 2016-10-04 | 도쿄엘렉트론가부시키가이샤 | Thermal processing apparatus |
| JP2016181563A (en) * | 2015-03-23 | 2016-10-13 | 東京エレクトロン株式会社 | Heat treatment device |
| JP7292775B1 (en) * | 2023-02-22 | 2023-06-19 | 株式会社昭和冷凍プラント | Installation method of insulation structure for refrigerant and multi-layer pipe for refrigerant |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH025172Y2 (en) | 1990-02-07 |
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