JPS6158782U - - Google Patents
Info
- Publication number
- JPS6158782U JPS6158782U JP13264384U JP13264384U JPS6158782U JP S6158782 U JPS6158782 U JP S6158782U JP 13264384 U JP13264384 U JP 13264384U JP 13264384 U JP13264384 U JP 13264384U JP S6158782 U JPS6158782 U JP S6158782U
- Authority
- JP
- Japan
- Prior art keywords
- door
- leaf spring
- serves
- vacuum device
- driven
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Details Of Valves (AREA)
- Drying Of Semiconductors (AREA)
- Lift Valve (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13264384U JPH0115980Y2 (en:Method) | 1984-08-31 | 1984-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13264384U JPH0115980Y2 (en:Method) | 1984-08-31 | 1984-08-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6158782U true JPS6158782U (en:Method) | 1986-04-19 |
| JPH0115980Y2 JPH0115980Y2 (en:Method) | 1989-05-11 |
Family
ID=30691206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13264384U Expired JPH0115980Y2 (en:Method) | 1984-08-31 | 1984-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0115980Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021229870A1 (ja) * | 2020-05-14 | 2021-11-18 | 株式会社島津製作所 | 質量分析装置 |
-
1984
- 1984-08-31 JP JP13264384U patent/JPH0115980Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021229870A1 (ja) * | 2020-05-14 | 2021-11-18 | 株式会社島津製作所 | 質量分析装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0115980Y2 (en:Method) | 1989-05-11 |