JPS6158782U - - Google Patents

Info

Publication number
JPS6158782U
JPS6158782U JP13264384U JP13264384U JPS6158782U JP S6158782 U JPS6158782 U JP S6158782U JP 13264384 U JP13264384 U JP 13264384U JP 13264384 U JP13264384 U JP 13264384U JP S6158782 U JPS6158782 U JP S6158782U
Authority
JP
Japan
Prior art keywords
door
leaf spring
serves
vacuum device
driven
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13264384U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0115980Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13264384U priority Critical patent/JPH0115980Y2/ja
Publication of JPS6158782U publication Critical patent/JPS6158782U/ja
Application granted granted Critical
Publication of JPH0115980Y2 publication Critical patent/JPH0115980Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Lift Valve (AREA)
  • Details Of Valves (AREA)
  • Drying Of Semiconductors (AREA)
JP13264384U 1984-08-31 1984-08-31 Expired JPH0115980Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13264384U JPH0115980Y2 (enrdf_load_stackoverflow) 1984-08-31 1984-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13264384U JPH0115980Y2 (enrdf_load_stackoverflow) 1984-08-31 1984-08-31

Publications (2)

Publication Number Publication Date
JPS6158782U true JPS6158782U (enrdf_load_stackoverflow) 1986-04-19
JPH0115980Y2 JPH0115980Y2 (enrdf_load_stackoverflow) 1989-05-11

Family

ID=30691206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13264384U Expired JPH0115980Y2 (enrdf_load_stackoverflow) 1984-08-31 1984-08-31

Country Status (1)

Country Link
JP (1) JPH0115980Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021229870A1 (ja) * 2020-05-14 2021-11-18 株式会社島津製作所 質量分析装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021229870A1 (ja) * 2020-05-14 2021-11-18 株式会社島津製作所 質量分析装置

Also Published As

Publication number Publication date
JPH0115980Y2 (enrdf_load_stackoverflow) 1989-05-11

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