JPS6158150A - Electron bombardment type rotary anode - Google Patents

Abstract

PURPOSE:To improve the input power of an electron beam by making the cooling water path in a rotary anode whose electron beam bombardment surface is formed into a cross-sectional V-shaped groove branch from the bottom of the V-shaped groove along both the opposed oblique sides. CONSTITUTION:A rotary anode 32 used in an X-ray generation source unit is formed by holding shaft sections 32a and 32b, dish-type electrode plate 32c whose electron bombardment surface of a circumferential section is provided with a cross-sectional groove 32m, donut-type disk 32d, and disk 32h screwed on tip of the shaft section 32b, providing a cooling water sending hole 32e and two or more discharge holes 32f in the shaft section 32b, and also providing two or more discharge holes 32g in the shaft section 32b. In addition, the cooling water from the sending hole 32e passes through a water path 32i, branches into water paths 32j and 32k from the section where the bottom of the V-shaped groove 32m is opposed to it, and is discharged from the discharge holes 32f and 32g. As a result, thermal energy can effectively be absorbed and the long use of the rotary anode can be achieved.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is an electron impact type rotating anode, in particular, the loss of electrons incident on the rotating anode used in an X-ray source device is small, and the input power of the electron beam is low. Concerning improvements to increase performance.

In patterning technology for high-density integrated circuits, pattern transfer using the soft X'f3Tin region with a wavelength of several to several tens of people has high resolution due to extremely small effects of diffraction and scattering, and is a fine and precise transfer method. It is attracting attention as The X-ray source device is an electron impact type,
Gas plasma types and the like have been used, and although the electron impact type has lower X-ray generation efficiency than the gas plasma type, it is now being reconsidered because it operates stably.

[Conventional technology]

FIG. 2 is a side view showing the main parts of the X'fa transfer device for explaining an example of its configuration.

In Figure 2, 1 is the X-ray generation chamber, 2 is X&? ! An exposure chamber, 3 a rotating anode (target), 4 an alignment coil, 5 an electron gun, 6 an X-ray extraction window, 7 a frame supporting the X-ray extraction window 6, and 8 a horizontally movable shutter. , 9 is a transfer mask on which a desired pattern is formed, 1
0 is a wafer with x+gA resist coated on the top surface, 1
1 is an electron beam, and 12.13 is an X-ray emitted from the target.

In the X-ray transfer device configured as described above, the electron beam 11 generated by the electron gun 5 is transferred to the alignment coil 4.
The X-rays 12 are irradiated onto the cylindrical surface 3a of the rotating anode 3 under the control of the X-rays 12, and the X-rays 13 transmitted through the X-ray extraction window 6 made of beryllium with a thickness of several tens of micrometers, for example, are irradiated onto the mask 9.

As a result, the X-rays 13 transfer the fine pattern of the mask 9 formed in advance to the resist of the wafer 10. The device with a rotating anode 3 has the advantage that the input power of the electron beam is greater than the conventional device with a fixed anode.

FIG. 3 is a cross-sectional view of the rotating anode 3 (A) and its A-A cross-sectional view (U), and FIG. 4 is a cross-sectional view of the rotating anode 13 in which a 7-shaped groove is formed on the electron beam impact surface (A). and its BB sectional view (D).

In FIG. 3, the rotating anode 3 whose electron beam impact surface is formed as a slope includes a flanged shaft portion 3a and a dish-shaped electrode plate 3b.
The shaft portion 3a is provided with a cooling water inlet hole 3d and a plurality of (six in the figure) cooling water discharge holes 3e.

Further, the flange 3f of the shaft portion 3a and the electrode plate 3b, and the flange 3'' of the shaft portion 3a and the disk 3c are a disk-shaped waterway 3g and a cooling water discharge hole 3e, which are connected to the cooling water inlet hole 3d, respectively. A donut-shaped waterway 3h is configured to communicate with each other.

Therefore, the cooling water flowing in from the inlet hole 3d passes through the disc-shaped water channels 3g and 3h and is discharged from the discharge hole 3e as shown by the arrow in FIG. When flowing along the inside of the surface 31, the electron impact surface 31, which has been heated by the impact of the electron beam, is cooled down.

In FIG. 4, the rotating anode 31 is characterized by less loss of incident electrons due to backscattering (scattering occurring at an angle of 90° or more with respect to the incident direction) than the rotating anode 3, and the power of the incident electron beam can be increased. , a groove 31 with a V-shaped cross section on the flanged shaft portion 31a and the outer peripheral portion (electron impact surface).
The dish-shaped electrode plate 31b and the donut-shaped disk 3 formed with
1c, etc., and the shaft portion 31a is provided with a cooling water inlet hole 31d and a plurality of (six in the figure) cooling water discharge holes 31e.

Then, the flange 31f of the shaft portion 31a and the electric 4'ft
41i 31b.

The flange 31f of the shaft portion 31a and the disc 31c are each connected to a water channel 31g by a cooling water inlet hole 31d.

The cooling water discharge hole 31e constitutes a water channel 31h.

Therefore, the cooling water flowing in from the inlet hole 31d passes through the disk-shaped water channels 31g and 31h and is discharged from the discharge hole 31e, but when flowing along the inside of the groove 31j of the electrode part 31b, it loses electrons. The electron impact surface 31i heated by the beam impact is cooled down.

Therefore, the cooling water of the rotating anode 31 flows along the 7-shaped groove 31j, that is, from one side of the V-shape to the other.

[Problem that the invention seeks to solve]

However, since the cooling water flowing along the groove 31j having a cross section of the figure 7 in the rotary anode 31 flows from one side of the figure 7 toward the other, the cooling water flows along one slope of the electron impact surface 31i near one side of the figure 7. On the other hand, the other slope of the electron impact surface 31i near the other side of the V-shape is cooled in the same manner as the one slope because the cooling water heated by the one slope flows. is not cooled.

At the same time, since the opposite slope of the waterway is bent along the figure 7 shape of 2f & 31j, a vortex is generated at the bent part, and air bubbles that have landed in the waterway facing the other slope are removed and dew is caused. There was a drawback.

As a result, it has been difficult to further increase the input power of the electron beam and improve its performance in the conventional X-ray transfer apparatus equipped with a rotating anode in which the electron beam impact surface is formed in a V-shaped groove in cross section.

[Means for solving problems]

The present invention has been made in view of the above-mentioned disadvantages of the cooling water flowing inside the rotating anode 31, and the present invention, which aims to eliminate the above-mentioned problems, has an electron beam impact surface formed in a 7-shaped groove in cross section. The electron impact type rotating anode is characterized in that a cooling water channel in the rotating anode is configured to branch from the bottom of the V-shaped groove to both opposing hypotenuses.

[Effect]

According to the above means, both of the opposing oblique sides of the electron impact surface having a V-shaped cross section are uniformly cooled, and the cooling water flows more smoothly than before, so that the electron impact surface has a V-shaped cross section. I was able to eliminate the adhesion of air bubbles.

Therefore, in the X-ray transfer apparatus equipped with a rotating single-field pole according to the present invention, the input power of the electron beam is improved, the chi-ray generation efficiency is increased, and the performance is improved.

〔Example〕

The electronic Ii according to the embodiments of the present invention will be explained below using the drawings.
The hammer-type concave anode will be explained.

Figure 1 is a cross-sectional view (A) of a rotating anode according to an embodiment of the present invention, its CC cross-sectional view (U), and its D-D cross-sectional view (C).
It is.

In FIG. 1, the rotating anode 32 includes shaft portions 32a and 32b, a dish-shaped electrode plate 32c having a groove 32m shaped like a square in cross section on its outer peripheral portion (electron impact surface), a donut-shaped disk 32d, and a shaft portion 3.
It consists of a disc 32h etc. screwed onto the tip of 2b.

The shaft portion 32a is provided with a cooling water inlet hole 32e and a plurality of (six in the figure) cooling water discharge holes 32f, and the shaft portion 32b is provided with a plurality of (six in the figure) cooling water discharge holes 32g. It is being

Then, the flange 32q of the shaft portion 32a and the disk 32h are separated by an appropriate amount m11, and the plate-shaped electrode plate 32c and the donut-shaped circle +
&32a, facing in the cavity formed by the flange 32q.
and the disc 32h are the water channel 3 that the cooling water inlet hole 32e communicates with.
2i, the flange 32Q, the disk 32d1, the disk 32h, and the electrode plate 32c constitute waterways 32j, 32k, which are connected by the discharge holes 32f, 32g, respectively.

Therefore, the cooling water flowing in from the inlet hole 32e passes through the disc-shaped waterway 32i and the waterways 32i, 32j, 32.
From the confluence point, that is, the part where the bottoms of the ■-shaped groove 32m face each other, the water is divided into channels 32j and 32k along both opposite oblique sides of the ■-shaped groove 32m, and the branched streams are discharged from the discharge holes 32 and 32f. Although each is discharged, the groove 3 of the electrode plate 32c
As it flows along the inner side of 2 m, it absorbs and removes the thermal energy generated by the impact of the electron beam 11.

Therefore, in the rotating anode 32, both of the opposing hypotenuses of the ■-shaped groove 32m are equally cooled, and
Since the flow velocity is weakened and no eddy current is generated in the water channels facing each other by 2 m, it has become possible to use the impact electron beam with a higher input power than the conventional rotating anode 3. At the same time, the loss of the impact electron beam is reduced.

In addition, in FIG. 1(a), the electrode plate 32c and the disk 32d
The joint portion 32n with the shaft portion 32a is airtightly joined by welding means.
A joint portion 32p between the disk 32d and a fitting portion 32o between the shaft portion 32b and the electrode plate 32c are screwed together using a sealant.

〔Effect of the invention〕

As explained above, according to the present invention, the manual power and loss of the impact electron beam are reduced and the life of the rotating anode is extended, so when applied to an X-ray transfer device, the performance of the device is improved and the transfer man-hours are reduced. The effects of shortening the time and long-term use of the rotating anode are extremely significant.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view (A) of a rotating anode according to an embodiment of the present invention, its CC cross-sectional view ([1)], and a D-DUT cross-sectional view ([1]).
c), , Fig. 2 is a side view showing the main parts of the X-ray transfer device to explain an example of its configuration, and Fig. 3 is a cross-sectional view of the rotating anode 3 (A) and its A-A cross-sectional view (B). , Figure 4 is a cross-sectional view (a) of the rotating anode 13 in which the cross-sectional ■-shaped groove is formed on the electron beam impact surface, and its B-B cross-sectional view (b).
, is. In the figure, l is the X-ray generation chamber, 2 is the XvA exposure chamber, 3.3L32 is the rotating anode (target), 4 is the alignment coil, 5 is the electron gun, 11 is the electron beam, 12.13 is the X-ray, 3a , 31a, 32a, 32b are shaft parts, 3b, 31b
, 32c is a dish-shaped electrode plate, 3c, 31c, 32d is a donut-shaped disk 3C, 13d, 31d, 32e are cooling water inlet holes 3d, 3e, 31e, 32f, 32g are cooling water discharge holes, 3g, 3h, 31g, 31h, 32t, 3
2j and 32 are water channels, 31 is an electron impact surface, and 31J + 32m is a groove (electron impact surface) with a ■-shaped cross section.

Claims (1)

[Claims] An electron impact type characterized in that a cooling water channel in a rotating anode in which an electron beam impact surface is formed in a V-shaped groove in cross section is configured to branch from the bottom of the V-shaped groove to both opposing hypotenuses. Rotating anode.