JPS615799Y2 - - Google Patents
Info
- Publication number
- JPS615799Y2 JPS615799Y2 JP1976152865U JP15286576U JPS615799Y2 JP S615799 Y2 JPS615799 Y2 JP S615799Y2 JP 1976152865 U JP1976152865 U JP 1976152865U JP 15286576 U JP15286576 U JP 15286576U JP S615799 Y2 JPS615799 Y2 JP S615799Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976152865U JPS615799Y2 (en:Method) | 1976-11-15 | 1976-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976152865U JPS615799Y2 (en:Method) | 1976-11-15 | 1976-11-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5370870U JPS5370870U (en:Method) | 1978-06-14 |
| JPS615799Y2 true JPS615799Y2 (en:Method) | 1986-02-21 |
Family
ID=28761066
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976152865U Expired JPS615799Y2 (en:Method) | 1976-11-15 | 1976-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS615799Y2 (en:Method) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50134769A (en:Method) * | 1974-04-15 | 1975-10-25 | ||
| JPS51110276A (ja) * | 1975-03-25 | 1976-09-29 | Tokyo Shibaura Electric Co | Gasuetsuchingusochi |
-
1976
- 1976-11-15 JP JP1976152865U patent/JPS615799Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5370870U (en:Method) | 1978-06-14 |