JPS6157525U - - Google Patents
Info
- Publication number
- JPS6157525U JPS6157525U JP14111484U JP14111484U JPS6157525U JP S6157525 U JPS6157525 U JP S6157525U JP 14111484 U JP14111484 U JP 14111484U JP 14111484 U JP14111484 U JP 14111484U JP S6157525 U JPS6157525 U JP S6157525U
- Authority
- JP
- Japan
- Prior art keywords
- wafer cassette
- cassette
- partition protrusions
- top surface
- vertical direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims description 3
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14111484U JPS6157525U (en18) | 1984-09-18 | 1984-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14111484U JPS6157525U (en18) | 1984-09-18 | 1984-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6157525U true JPS6157525U (en18) | 1986-04-17 |
Family
ID=30699459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14111484U Pending JPS6157525U (en18) | 1984-09-18 | 1984-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6157525U (en18) |
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1984
- 1984-09-18 JP JP14111484U patent/JPS6157525U/ja active Pending