JPS6157524U - - Google Patents
Info
- Publication number
- JPS6157524U JPS6157524U JP14111384U JP14111384U JPS6157524U JP S6157524 U JPS6157524 U JP S6157524U JP 14111384 U JP14111384 U JP 14111384U JP 14111384 U JP14111384 U JP 14111384U JP S6157524 U JPS6157524 U JP S6157524U
- Authority
- JP
- Japan
- Prior art keywords
- wafer cassette
- partitioning
- cassette
- displayed
- top surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000638 solvent extraction Methods 0.000 claims 2
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14111384U JPS6157524U (es) | 1984-09-18 | 1984-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14111384U JPS6157524U (es) | 1984-09-18 | 1984-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6157524U true JPS6157524U (es) | 1986-04-17 |
Family
ID=30699458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14111384U Pending JPS6157524U (es) | 1984-09-18 | 1984-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6157524U (es) |
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1984
- 1984-09-18 JP JP14111384U patent/JPS6157524U/ja active Pending