JPS6156543U - - Google Patents
Info
- Publication number
- JPS6156543U JPS6156543U JP14050584U JP14050584U JPS6156543U JP S6156543 U JPS6156543 U JP S6156543U JP 14050584 U JP14050584 U JP 14050584U JP 14050584 U JP14050584 U JP 14050584U JP S6156543 U JPS6156543 U JP S6156543U
- Authority
- JP
- Japan
- Prior art keywords
- support portion
- thin
- diaphragm
- pressure sensor
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive effect Effects 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14050584U JPS6156543U (de) | 1984-09-17 | 1984-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14050584U JPS6156543U (de) | 1984-09-17 | 1984-09-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6156543U true JPS6156543U (de) | 1986-04-16 |
Family
ID=30698858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14050584U Pending JPS6156543U (de) | 1984-09-17 | 1984-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6156543U (de) |
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1984
- 1984-09-17 JP JP14050584U patent/JPS6156543U/ja active Pending