JPS6155333U - - Google Patents

Info

Publication number
JPS6155333U
JPS6155333U JP14057284U JP14057284U JPS6155333U JP S6155333 U JPS6155333 U JP S6155333U JP 14057284 U JP14057284 U JP 14057284U JP 14057284 U JP14057284 U JP 14057284U JP S6155333 U JPS6155333 U JP S6155333U
Authority
JP
Japan
Prior art keywords
byproduct
supply pipe
cleaning device
suction port
exhaust fan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14057284U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14057284U priority Critical patent/JPS6155333U/ja
Publication of JPS6155333U publication Critical patent/JPS6155333U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の一実施例による清掃装置の配
置図である。 1:吸入口、2:給水管、4:分離器、6:粉
体タンク、7:排風機。
FIG. 1 is a layout diagram of a cleaning device according to an embodiment of the present invention. 1: Suction port, 2: Water supply pipe, 4: Separator, 6: Powder tank, 7: Exhaust fan.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 排風機の吸気側に副生成物集積タンクおよび副
生成物と水の分離器を介して吸入口が接続され、
さらに吸入口に給水管が接続されたことを特徴と
する気相成長反応室清掃装置。
An inlet is connected to the intake side of the exhaust fan via a byproduct collection tank and a byproduct and water separator,
A vapor phase growth reaction chamber cleaning device further characterized in that a water supply pipe is connected to the suction port.
JP14057284U 1984-09-17 1984-09-17 Pending JPS6155333U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14057284U JPS6155333U (en) 1984-09-17 1984-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14057284U JPS6155333U (en) 1984-09-17 1984-09-17

Publications (1)

Publication Number Publication Date
JPS6155333U true JPS6155333U (en) 1986-04-14

Family

ID=30698928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14057284U Pending JPS6155333U (en) 1984-09-17 1984-09-17

Country Status (1)

Country Link
JP (1) JPS6155333U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12028987B2 (en) 2022-04-30 2024-07-02 PAC Tech—Packaging Technologies GmbH Method for soldering an electronic component to a circuit board by jetting liquefied solder into a through hole

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12028987B2 (en) 2022-04-30 2024-07-02 PAC Tech—Packaging Technologies GmbH Method for soldering an electronic component to a circuit board by jetting liquefied solder into a through hole

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