JPS6154463B2 - - Google Patents
Info
- Publication number
- JPS6154463B2 JPS6154463B2 JP16182783A JP16182783A JPS6154463B2 JP S6154463 B2 JPS6154463 B2 JP S6154463B2 JP 16182783 A JP16182783 A JP 16182783A JP 16182783 A JP16182783 A JP 16182783A JP S6154463 B2 JPS6154463 B2 JP S6154463B2
- Authority
- JP
- Japan
- Prior art keywords
- dust collection
- dust
- electrode
- photodetector
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 claims description 76
- 238000000576 coating method Methods 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 11
- 239000012717 electrostatic precipitator Substances 0.000 claims description 11
- 239000011248 coating agent Substances 0.000 claims description 5
- 239000013307 optical fiber Substances 0.000 claims description 5
- 230000004907 flux Effects 0.000 claims 1
- 239000010419 fine particle Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 239000000779 smoke Substances 0.000 description 2
- 238000003915 air pollution Methods 0.000 description 1
- 238000004887 air purification Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 239000012716 precipitator Substances 0.000 description 1
- 230000001846 repelling effect Effects 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Electrostatic Separation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16182783A JPS6054748A (ja) | 1983-09-05 | 1983-09-05 | 集塵電極の集塵限界検出装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16182783A JPS6054748A (ja) | 1983-09-05 | 1983-09-05 | 集塵電極の集塵限界検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6054748A JPS6054748A (ja) | 1985-03-29 |
JPS6154463B2 true JPS6154463B2 (enrdf_load_stackoverflow) | 1986-11-22 |
Family
ID=15742664
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16182783A Granted JPS6054748A (ja) | 1983-09-05 | 1983-09-05 | 集塵電極の集塵限界検出装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6054748A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0760650A (ja) * | 1993-08-25 | 1995-03-07 | Tone Corp | 消音、強力ダイヤモンドブレード基板 |
EP1376142A1 (en) | 2002-06-25 | 2004-01-02 | Hubbell Incorporated | Method and apparatus for testing an electrical component |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4019267B2 (ja) * | 2002-11-21 | 2007-12-12 | 株式会社島津製作所 | 大気中の浮遊粒子状物質の捕集装置 |
JP4058624B2 (ja) * | 2002-11-28 | 2008-03-12 | 株式会社島津製作所 | 大気中の浮遊粒子状物質の捕集・測定装置 |
JP5846805B2 (ja) * | 2010-08-19 | 2016-01-20 | 株式会社半導体エネルギー研究所 | 微粒子捕集装置及び真空処理装置 |
-
1983
- 1983-09-05 JP JP16182783A patent/JPS6054748A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0760650A (ja) * | 1993-08-25 | 1995-03-07 | Tone Corp | 消音、強力ダイヤモンドブレード基板 |
EP1376142A1 (en) | 2002-06-25 | 2004-01-02 | Hubbell Incorporated | Method and apparatus for testing an electrical component |
Also Published As
Publication number | Publication date |
---|---|
JPS6054748A (ja) | 1985-03-29 |
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