JPS6154279U - - Google Patents
Info
- Publication number
- JPS6154279U JPS6154279U JP14016484U JP14016484U JPS6154279U JP S6154279 U JPS6154279 U JP S6154279U JP 14016484 U JP14016484 U JP 14016484U JP 14016484 U JP14016484 U JP 14016484U JP S6154279 U JPS6154279 U JP S6154279U
- Authority
- JP
- Japan
- Prior art keywords
- airtight chamber
- airtight
- air
- outside
- partition wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009423 ventilation Methods 0.000 claims description 9
- 238000005192 partition Methods 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims 6
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14016484U JPS6154279U (enExample) | 1984-09-14 | 1984-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14016484U JPS6154279U (enExample) | 1984-09-14 | 1984-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6154279U true JPS6154279U (enExample) | 1986-04-11 |
Family
ID=30698520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14016484U Pending JPS6154279U (enExample) | 1984-09-14 | 1984-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6154279U (enExample) |
-
1984
- 1984-09-14 JP JP14016484U patent/JPS6154279U/ja active Pending
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