JPS6154279U - - Google Patents

Info

Publication number
JPS6154279U
JPS6154279U JP14016484U JP14016484U JPS6154279U JP S6154279 U JPS6154279 U JP S6154279U JP 14016484 U JP14016484 U JP 14016484U JP 14016484 U JP14016484 U JP 14016484U JP S6154279 U JPS6154279 U JP S6154279U
Authority
JP
Japan
Prior art keywords
airtight chamber
airtight
air
outside
partition wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14016484U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14016484U priority Critical patent/JPS6154279U/ja
Publication of JPS6154279U publication Critical patent/JPS6154279U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
JP14016484U 1984-09-14 1984-09-14 Pending JPS6154279U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14016484U JPS6154279U (enrdf_load_stackoverflow) 1984-09-14 1984-09-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14016484U JPS6154279U (enrdf_load_stackoverflow) 1984-09-14 1984-09-14

Publications (1)

Publication Number Publication Date
JPS6154279U true JPS6154279U (enrdf_load_stackoverflow) 1986-04-11

Family

ID=30698520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14016484U Pending JPS6154279U (enrdf_load_stackoverflow) 1984-09-14 1984-09-14

Country Status (1)

Country Link
JP (1) JPS6154279U (enrdf_load_stackoverflow)

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