JPS6151738U - - Google Patents

Info

Publication number
JPS6151738U
JPS6151738U JP13575584U JP13575584U JPS6151738U JP S6151738 U JPS6151738 U JP S6151738U JP 13575584 U JP13575584 U JP 13575584U JP 13575584 U JP13575584 U JP 13575584U JP S6151738 U JPS6151738 U JP S6151738U
Authority
JP
Japan
Prior art keywords
cooling
semiconductor evaluation
cooling pool
liquid nitrogen
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13575584U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13575584U priority Critical patent/JPS6151738U/ja
Publication of JPS6151738U publication Critical patent/JPS6151738U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP13575584U 1984-09-07 1984-09-07 Pending JPS6151738U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13575584U JPS6151738U (enrdf_load_stackoverflow) 1984-09-07 1984-09-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13575584U JPS6151738U (enrdf_load_stackoverflow) 1984-09-07 1984-09-07

Publications (1)

Publication Number Publication Date
JPS6151738U true JPS6151738U (enrdf_load_stackoverflow) 1986-04-07

Family

ID=30694237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13575584U Pending JPS6151738U (enrdf_load_stackoverflow) 1984-09-07 1984-09-07

Country Status (1)

Country Link
JP (1) JPS6151738U (enrdf_load_stackoverflow)

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