JPS6151738U - - Google Patents
Info
- Publication number
- JPS6151738U JPS6151738U JP13575584U JP13575584U JPS6151738U JP S6151738 U JPS6151738 U JP S6151738U JP 13575584 U JP13575584 U JP 13575584U JP 13575584 U JP13575584 U JP 13575584U JP S6151738 U JPS6151738 U JP S6151738U
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- semiconductor evaluation
- cooling pool
- liquid nitrogen
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 4
- 238000011156 evaluation Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims 1
- 239000000523 sample Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13575584U JPS6151738U (cs) | 1984-09-07 | 1984-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13575584U JPS6151738U (cs) | 1984-09-07 | 1984-09-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6151738U true JPS6151738U (cs) | 1986-04-07 |
Family
ID=30694237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13575584U Pending JPS6151738U (cs) | 1984-09-07 | 1984-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6151738U (cs) |
-
1984
- 1984-09-07 JP JP13575584U patent/JPS6151738U/ja active Pending
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