JPS6151109U - - Google Patents
Info
- Publication number
- JPS6151109U JPS6151109U JP13753284U JP13753284U JPS6151109U JP S6151109 U JPS6151109 U JP S6151109U JP 13753284 U JP13753284 U JP 13753284U JP 13753284 U JP13753284 U JP 13753284U JP S6151109 U JPS6151109 U JP S6151109U
- Authority
- JP
- Japan
- Prior art keywords
- utility
- model registration
- nitride
- oxide
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 claims description 2
- 238000007733 ion plating Methods 0.000 claims description 2
- 230000003796 beauty Effects 0.000 claims 3
- 150000004767 nitrides Chemical class 0.000 claims 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13753284U JPS6151109U (enrdf_load_html_response) | 1984-09-11 | 1984-09-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13753284U JPS6151109U (enrdf_load_html_response) | 1984-09-11 | 1984-09-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6151109U true JPS6151109U (enrdf_load_html_response) | 1986-04-05 |
Family
ID=30695947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13753284U Pending JPS6151109U (enrdf_load_html_response) | 1984-09-11 | 1984-09-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6151109U (enrdf_load_html_response) |
-
1984
- 1984-09-11 JP JP13753284U patent/JPS6151109U/ja active Pending
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