JPS6151029B2 - - Google Patents

Info

Publication number
JPS6151029B2
JPS6151029B2 JP54005626A JP562679A JPS6151029B2 JP S6151029 B2 JPS6151029 B2 JP S6151029B2 JP 54005626 A JP54005626 A JP 54005626A JP 562679 A JP562679 A JP 562679A JP S6151029 B2 JPS6151029 B2 JP S6151029B2
Authority
JP
Japan
Prior art keywords
sleeve
sputtering
mandrel
anode
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54005626A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55100980A (en
Inventor
Rudorufu Kueenru Manfuretsudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coulter Systems Corp
Original Assignee
Coulter Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Coulter Systems Corp filed Critical Coulter Systems Corp
Priority to JP562679A priority Critical patent/JPS55100980A/ja
Publication of JPS55100980A publication Critical patent/JPS55100980A/ja
Publication of JPS6151029B2 publication Critical patent/JPS6151029B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Physical Vapour Deposition (AREA)
JP562679A 1979-01-23 1979-01-23 Sputtering device Granted JPS55100980A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP562679A JPS55100980A (en) 1979-01-23 1979-01-23 Sputtering device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP562679A JPS55100980A (en) 1979-01-23 1979-01-23 Sputtering device

Publications (2)

Publication Number Publication Date
JPS55100980A JPS55100980A (en) 1980-08-01
JPS6151029B2 true JPS6151029B2 (cs) 1986-11-07

Family

ID=11616359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP562679A Granted JPS55100980A (en) 1979-01-23 1979-01-23 Sputtering device

Country Status (1)

Country Link
JP (1) JPS55100980A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59179781A (ja) * 1983-03-31 1984-10-12 Kawasaki Heavy Ind Ltd スパツタリング装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3829373A (en) * 1973-01-12 1974-08-13 Coulter Information Systems Thin film deposition apparatus using segmented target means

Also Published As

Publication number Publication date
JPS55100980A (en) 1980-08-01

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