JPS6149713U - - Google Patents

Info

Publication number
JPS6149713U
JPS6149713U JP13477684U JP13477684U JPS6149713U JP S6149713 U JPS6149713 U JP S6149713U JP 13477684 U JP13477684 U JP 13477684U JP 13477684 U JP13477684 U JP 13477684U JP S6149713 U JPS6149713 U JP S6149713U
Authority
JP
Japan
Prior art keywords
transfer device
clean air
load
cover
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13477684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0237763Y2 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13477684U priority Critical patent/JPH0237763Y2/ja
Publication of JPS6149713U publication Critical patent/JPS6149713U/ja
Application granted granted Critical
Publication of JPH0237763Y2 publication Critical patent/JPH0237763Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Ventilation (AREA)
JP13477684U 1984-09-04 1984-09-04 Expired JPH0237763Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13477684U JPH0237763Y2 (ko) 1984-09-04 1984-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13477684U JPH0237763Y2 (ko) 1984-09-04 1984-09-04

Publications (2)

Publication Number Publication Date
JPS6149713U true JPS6149713U (ko) 1986-04-03
JPH0237763Y2 JPH0237763Y2 (ko) 1990-10-12

Family

ID=30693281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13477684U Expired JPH0237763Y2 (ko) 1984-09-04 1984-09-04

Country Status (1)

Country Link
JP (1) JPH0237763Y2 (ko)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62200610U (ko) * 1986-06-10 1987-12-21
JPS6348706U (ko) * 1986-09-17 1988-04-02
JP2011173478A (ja) * 2010-02-24 2011-09-08 Muratec Automation Co Ltd 搬送車システム

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62200610U (ko) * 1986-06-10 1987-12-21
JPS6348706U (ko) * 1986-09-17 1988-04-02
JP2011173478A (ja) * 2010-02-24 2011-09-08 Muratec Automation Co Ltd 搬送車システム

Also Published As

Publication number Publication date
JPH0237763Y2 (ko) 1990-10-12

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