JPS6149556A - Reader for radiation image information - Google Patents

Reader for radiation image information

Info

Publication number
JPS6149556A
JPS6149556A JP59171227A JP17122784A JPS6149556A JP S6149556 A JPS6149556 A JP S6149556A JP 59171227 A JP59171227 A JP 59171227A JP 17122784 A JP17122784 A JP 17122784A JP S6149556 A JPS6149556 A JP S6149556A
Authority
JP
Japan
Prior art keywords
light
sheet
afterglow
scanning
image information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59171227A
Other languages
Japanese (ja)
Other versions
JPH0448022B2 (en
Inventor
Masaru Noguchi
勝 野口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP59171227A priority Critical patent/JPS6149556A/en
Priority to US06/766,202 priority patent/US4800276A/en
Publication of JPS6149556A publication Critical patent/JPS6149556A/en
Publication of JPH0448022B2 publication Critical patent/JPH0448022B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Conversion Of X-Rays Into Visible Images (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
  • Facsimile Scanning Arrangements (AREA)

Abstract

PURPOSE:To reduce influence upon a readout and improve readout accuracy by preventing an afterglow of instantaneous light emission, an afterglow of accelerated phosphorescence, and accelerated phosphorescence from outside a scanned part to strike a converging body through a means which is easily designed and manufactured. CONSTITUTION:A memory type light emitting body sheet 3 provided to the reader is moved as shown by an arrow B to make a subscan, a main scan of laser scanning light 1b as exciting light is made along scanning lines 3a, and accelerated phosphorescence 1c is caused at the scanning position on the sheet 3. Further, emitted light 1c is made incident on the sheet 3 within a range of a visual angle theta and a cylindrical lens 5 is provided to converge the light only in the subscanning direction B. A light shield member 6 is arranged over the convergence position on the lens 5 and the emitted light 1c is made incident on the incidence surface 4a of the converging body 4 through the slit 6a of the material 6. Thus, an afterglow of instantaneous light emission, an afterglow of accelerated phosphorescence, and accelerated phosphorescence from outside the scanned body are prevented from being incident on the converging body 4 to reduce influence upon a readout, improving readout precision.

Description

【発明の詳細な説明】 (発明の分野) 本発明は蓄積性螢光体シートに蓄積記録された放射線画
像情報の読取装置に関し、ざらに詳細には、蓄積性螢光
体シートに蓄積記録された放射線画像情報に応じて該シ
ートより放繭される輝尽発光光を正確に読み取ることの
できる放射線画像情報読取装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Field of the Invention) The present invention relates to a reading device for radiation image information stored and recorded on a stimulable phosphor sheet. The present invention relates to a radiation image information reading device that can accurately read stimulated luminescence light emitted from the sheet in accordance with the radiation image information obtained.

(発明の技術的背景および従来技術) ある種の螢光体に放射線(X線、α線、β線、γ線、紫
外線等)を照射すると、この放射線エネルギーの一部が
螢光体中に蓄積され、この螢光体に可視光等の励起光を
照射すると、蓄積されたエネルギーに応じて螢光体が輝
尽発光を示すことが知られており、このような性質を示
す螢光体は蓄積性螢光体と呼ばれる。
(Technical Background of the Invention and Prior Art) When a certain type of phosphor is irradiated with radiation (X-rays, α-rays, β-rays, γ-rays, ultraviolet rays, etc.), part of this radiation energy is absorbed into the phosphor. It is known that when this phosphor is irradiated with excitation light such as visible light, the phosphor exhibits stimulated luminescence depending on the accumulated energy. is called a storage fluorophore.

この蓄積性螢光体を利用して、人体等の被写体の放射、
線画像情報を一旦蓄積性螢光体からなる層を有するシー
ト(以下、「蓄積性蛍光体シート」あるいは単に「シー
ト」と言う。)に記録し、この蓄積性螢光体シートをレ
ーザー光等の励起光で走査して輝尽発光光を生「しめ、
その輝尽発光光を光電的に読み取って画像信号を得、こ
の画像信号を処理して診断適正の良い被写体の放射線画
像を得る放射線画像情報記録再生方法が提案されている
。(例えは特開昭55−12429号、同56−113
95号、同55−163472号、同56−10464
5@、同55−1163/10号など) 以下に、上述の如く提案されている放射線画像情報記録
再生方法に用いられる放射線画像情報読取装置を第5図
に示し、これによりその機慣を説明する。
Using this stimulable phosphor, the radiation of subjects such as the human body,
Line image information is once recorded on a sheet having a layer made of a stimulable phosphor (hereinafter referred to as a ``stimulable phosphor sheet'' or simply ``sheet''), and this stimulable phosphor sheet is exposed to a laser beam, etc. scan with excitation light to generate stimulated luminescence light.
A radiation image information recording and reproducing method has been proposed in which the stimulated luminescence light is read photoelectrically to obtain an image signal, and the image signal is processed to obtain a radiation image of the subject that is suitable for diagnosis. (For example, JP-A-55-12429, JP-A-56-113
No. 95, No. 55-163472, No. 56-10464
5@, No. 55-1163/10, etc.) The radiographic image information reading device used in the radiographic image information recording and reproducing method proposed above is shown in FIG. 5, and its convenience will be explained using this figure. do.

励起光としてレーザー光源101から一定強度のレーザ
ー光101aをガルバノメータミラー102に人’JJ
 c’せ、このガルバノメータミラー102によって、
ガルバノメータミラー102の下方に置かれたシート1
03の幅方向にレーザ光が主走査(矢印へ方向の走査)
するように、レーザ光を偏向してシート103に照射す
る。さらにシート103は、例えばエンドレスベルト装
置109上に吸着されて、矢印B方向へ搬送されるため
、副走査とほぼ直交する角度で主走査が繰り返され、シ
ート103の全面にわたるレーザ光101bによる2次
元的走査が行なわれる。このた”め、レーザ光101b
による走査に従ってレーザ光101bの照射されたシー
トの個所は、蓄積記録された画像情報に応じた強度で輝
尽発光し、この発光光が、シート近くで主走査線に平行
に入射端面104aが形成されlζ透明な集光体104
の入射端面104aから集光体104に入る。この集光
体104はシート103近くに位置する前端部104b
が平面状に形成されるとともに、後端側に向かって次第
に円筒状になるように形成されていて、その後端部10
4Gにおいてほぼ円筒状となって7オトマル105と結
合しているので、入射端面104aから入った輝尽発光
光を後端部104Cに集めてフAトマル105に伝える
。フォトマル105においC1輝尽発光光が電気信号に
変換された後、画像情報読取回路106に送られる。こ
の画像情報読取回路106によつC前記電気信号が処理
され、例えばCRT 107に可視像として出ノjさせ
たり、磁気テープ108に記録させたり、あるいは西接
写杓感光材料等にハードコピーとして記録さゼたりする
ことができる。
A laser beam 101a of a constant intensity is emitted from a laser light source 101 as excitation light to a galvanometer mirror 102.
c', by this galvanometer mirror 102,
Sheet 1 placed below the galvanometer mirror 102
Laser light main scans in the width direction of 03 (scanning in the direction of the arrow)
The laser beam is deflected and irradiated onto the sheet 103 in such a manner. Furthermore, since the sheet 103 is attracted onto, for example, an endless belt device 109 and conveyed in the direction of arrow B, the main scan is repeated at an angle substantially perpendicular to the sub-scan, and the entire surface of the sheet 103 is illuminated by the laser beam 101b. A target scan is performed. For this reason, the laser beam 101b
The part of the sheet irradiated with the laser beam 101b as scanned by the laser beam 101b emits stimulated light with an intensity corresponding to the accumulated and recorded image information, and this emitted light forms an incident end face 104a parallel to the main scanning line near the sheet. Transparent light collector 104
The light enters the light condenser 104 from the incident end face 104a. This light condenser 104 has a front end 104b located near the sheet 103.
is formed into a planar shape and gradually becomes cylindrical toward the rear end side, and the rear end portion 10
Since it has a substantially cylindrical shape at 4G and is connected to the 7-optional 105, the stimulated luminescent light entering from the incident end surface 104a is collected at the rear end 104C and transmitted to the 7-optional 105. After the C1 stimulated luminescence light is converted into an electrical signal in the photomultiple 105, it is sent to the image information reading circuit 106. The electrical signal is processed by the image information reading circuit 106, and is output as a visible image on a CRT 107, recorded on a magnetic tape 108, or as a hard copy on a photosensitive material for close-up photography. It can also be recorded.

−に記読取りの際、集光体104は、その入射端面10
4aが主走査線に平行でシート103のほぼ全幅にわた
る幅を右するため、入射端面104aを見込むことかで
゛きる個所からの光はすべて読み取ることになり、レー
ザ光101bが入射した個所からの輝尽発光光たけでな
く、入射端面104aを見込むことのできるシート10
3上の他の個所からの光も全て読み取ってしまう。この
入射端面104aに入射して読み取られる輝尽発光光以
外の光として、シート103の発する残光が問題となっ
てくる。この残光には、瞬時発光残光と輝尽発光残光と
がある。
- When reading data, the light condenser 104
4a is parallel to the main scanning line and covers almost the entire width of the sheet 103, so all the light from the place where the incident end surface 104a can be seen is read, and the light from the place where the laser beam 101b is incident is read. A sheet 10 that allows you to see not only the stimulated luminescent light but also the incident end surface 104a.
It also reads all the light coming from other places on 3. The afterglow emitted by the sheet 103 poses a problem as light other than the stimulated luminescent light that enters the incident end surface 104a and is read. This afterglow includes instantaneous luminescence afterglow and stimulated luminescence afterglow.

瞬時発光残光とは、シートに画像情報を記録するために
放射線を照射した時のシートの瞬R発光光が、放射線の
照射を断った後もその発光が消えないで減衰しながら発
光し続ける現象を言う。この瞬時発光残光の特性は、シ
ートに用いられる蓄積性螢光体の種類によって異なるが
、一般的には第6図に示すようなものである。第6図は
縦軸に発光強度、横軸に時間(1)を示したグラフであ
り、放射線照射を時刻t1からt2までの△t2時間行
なった後、照射を断つと、発光強度のit A !1の
瞬時発光光はその強度が直ちにOどはならず、徐々に時
定数が大きくなる指数関数に治ってその強度が低下する
瞬時発光残光が示されている。
Instantaneous light emission afterglow refers to the instantaneous R light emitted from a sheet when radiation is irradiated to record image information on the sheet. Even after the radiation irradiation is stopped, the light does not disappear and continues to emit light while attenuating. describe a phenomenon. The characteristics of this instantaneous light emission afterglow vary depending on the type of stimulable phosphor used in the sheet, but are generally as shown in FIG. FIG. 6 is a graph showing luminescence intensity on the vertical axis and time (1) on the horizontal axis. After radiation irradiation was performed for Δt2 hours from time t1 to t2, when the irradiation was cut off, the luminescence intensity it A ! The intensity of the instantaneous light emitted in No. 1 does not immediately reach 0, but it shows an instantaneous afterglow in which the intensity decreases as an exponential function with a gradually increasing time constant.

この瞬時発光残光の発光強度の減衰は、具体的には、た
とえば放射線照射後約180秒(すなわち、(i3−’
l:2 )−180秒)の時点II j 3. I+に
おける瞬時発光残光の発光強度゛8″が、オーダー的に
は励起光走査により発生ずる輝尽発光光の強度の約10
′4倍程度となる。
Specifically, the attenuation of the luminescence intensity of this instantaneous luminescence afterglow is, for example, about 180 seconds after radiation irradiation (i.e., (i3-'
l:2)-180 seconds) II j 3. The luminescence intensity of the instantaneous luminescence afterglow at I+ is approximately 10% of the intensity of the stimulated luminescence light generated by excitation light scanning in terms of order.
'4 times as much.

このため、シートに被写体を通して放射線を照射して画
像情報を記録した後、この画像情報を読み取るまで+、
1所定時間経過すれば瞬時発光残光はその強度が十分低
下し、残光が無視できる位になる。しかしながら、放射
線画像情報を記録後直ちに読み取りを行なう場合、たと
えば本出願人が先に出願した特願昭58−66730号
に開示されているような放射線画像情報読取装置に画像
情報記録部が一体的に組込まれたもの(すなわち、放射
線画像情報記録読取装置)を用いて、記録および読み取
りを連続的に、高速且つ大量に行なう場合には、輝尽発
光光とともに@R発光残光をその発光強度が十分減衰し
ないうちに読み取ることとなり、読み取った画像情報に
対する瞬時発光残光の影響が大きくなる。
For this reason, after recording image information by irradiating the sheet with radiation through the subject, until this image information is read,
After one predetermined period of time has elapsed, the intensity of the instantaneous light emission afterglow decreases sufficiently, and the afterglow becomes negligible. However, when reading radiation image information immediately after recording, the image information recording section is integrated into a radiation image information reading device, such as that disclosed in Japanese Patent Application No. 58-66730 previously filed by the present applicant. When recording and reading are performed continuously, at high speed, and in large quantities using a device built into a radiographic image information recording/reading device (i.e., a radiographic image information recording/reading device), the @R emission afterglow as well as the stimulated emission light is The light is read before the light has sufficiently attenuated, and the influence of the instantaneous light emission afterglow on the read image information becomes large.

また、輝尽発光光は、励起光が入射した掻く小さな面積
の個所から発光するのに対し、瞬時発光残光は放射線が
照射された全面から発光するため、第5図において示し
た集光体104の入射端面104aからは、輝尽発光光
と、入射端面104aを見込むことのできる個所すべて
からの瞬時発光残光とが同時に取り込まれてフォトマル
105に送られる。この場合、シート103のレーザ光
が照射される個所の面積に比べ′c1集光体104の・
入射端面104aを見込むことのできる個所−の面積が
桁外れに大きいため、前述のように放射線の照射後所定
am経過して、瞬時発光残光の強度が輝尽発光光の強度
と比較して無視できる程小さくなったとしても、フォト
マル105に伝わる光量としては、瞬時発光残光の光量
は無視できなくなる。
In addition, stimulated luminescence light is emitted from a small area where the excitation light is incident, whereas instantaneous luminescence afterglow is emitted from the entire surface irradiated with radiation. From the incident end surface 104a of the photomultiplier 104, stimulated luminescence light and instantaneous emission afterglow from all locations where the incident end surface 104a can be seen are simultaneously taken in and sent to the photomultiple 105. In this case, compared to the area of the sheet 103 where the laser beam is irradiated, the
Since the area of the part where the entrance end face 104a can be seen is extremely large, as mentioned above, after a certain amount of am has elapsed after radiation irradiation, the intensity of the instantaneous emission afterglow is ignored compared to the intensity of the stimulated emission light. Even if it is made as small as possible, the amount of light transmitted to the photomultiple 105 due to the instantaneous light emission afterglow cannot be ignored.

一方、輝尽発光残光とは、シートに蓄積記録された放射
線透過画像を読み取るために励起光(たとえばレーザ光
)を照射して輝尽発光させた後励起光を遮断しても、輝
尽発光光が遮断と同時には消えないで減衰しながらも発
光し続ける現象を言う。この輝尽発光残光の特性は、シ
ートに用いられる蓄積性螢光体の種類によって異なるが
、一般的には第7図に示すようなものである。第7図は
縦軸に発光強度、横軸に時間(1)を示したグラフであ
り、励起光を時刻t4がらt5までの△t6時間照射し
た後、これを遮断すると、発光強度“CI+の輝尽発光
光はその強度が直ちに0とはならず、徐々に時定数が大
きくなる指数関数に沿ってその強度が低下づる。(すな
わち、最初は急速に強度が低下し、その接体々に低下率
が小さくなる。) この輝尽発光残光の発光強度の減衰は、具体的には、た
とえば初期め時定数が1マイクロ秒程度である。すなわ
ち発光強度が1/e(D/C=1/e)になる時間(1
:s  j5)が1マイクロ秒程度である。ところで一
般にガルバノメータミラーによって励起光を蓄積性螢光
体シート上に走査〈主走査)させる時の速度は、約50
ヘルツ程度であるので、1回の走査に約20,000マ
イクロ秒要する。このため、初期時定数1マイクロ秒の
指数関数に冶って減衰する輝尽発光残光の強度は輝尽発
光光の強度と比較して桁違いに小さくなり、各点にJ3
りる輝尽発光残光は強度とし−ではほとんど無視できる
程度のものとなる。
On the other hand, stimulated luminescence afterglow refers to irradiation of excitation light (e.g., laser light) in order to read the radiographic image stored and recorded on the sheet to cause stimulated luminescence. This refers to a phenomenon in which emitted light does not disappear at the same time as it is interrupted, but continues to emit light even though it is attenuated. The characteristics of this stimulated luminescence afterglow vary depending on the type of stimulable phosphor used in the sheet, but are generally as shown in FIG. 7. FIG. 7 is a graph showing the luminescence intensity on the vertical axis and the time (1) on the horizontal axis. When the excitation light is irradiated for Δt6 hours from time t4 to t5 and then cut off, the luminescence intensity "CI+" The intensity of stimulated luminescence does not immediately go to zero, but decreases along an exponential function with a gradually increasing time constant. (In other words, the intensity decreases rapidly at first, and then Specifically, the attenuation of the luminescence intensity of this stimulated luminescence afterglow has an initial time constant of about 1 microsecond. That is, the luminescence intensity is reduced to 1/e (D/C= 1/e)
:s j5) is about 1 microsecond. By the way, generally speaking, the speed at which the excitation light is scanned (main scanning) on the stimulable phosphor sheet by a galvanometer mirror is approximately 50
Since it is on the order of Hertz, one scan takes approximately 20,000 microseconds. Therefore, the intensity of the stimulated luminescence afterglow, which decays exponentially with an initial time constant of 1 microsecond, is an order of magnitude smaller than the intensity of the stimulated luminescent light, and each point has J3
The intensity of the stimulated luminescence afterglow becomes almost negligible at -.

しかしながら輝尽発光光は励起光が入射した極く小さな
面積の個所から発光するのに対し、輝尽発光残光は励起
光により走査された面すべてから発光するため、第5図
において示した集光体104の入射端面104aからは
、輝尽発光光と、入射端面104aを見込むことのでき
る個所すべて      、からの輝尽発光残光とが同
時に取り込まれてフォトマル105に送られる。この場
合シート103に励起光が入射して輝尽発光づる個所の
面積に比  −へて、励起光の走査により輝尽発光残光
が生じている個所の面積が瞬時発光残光の場合と同様桁
外れに大きいため、前述のように輝尽発光残光の強度が
、輝尽発光光の強度と比較して無視できる程小さくても
、フォトマル105に伝わる光量としでは、輝尽発光残
光の光量は無視できなくなる。
However, stimulated luminescence light is emitted from a very small area where the excitation light is incident, whereas stimulated luminescence afterglow is emitted from all the surfaces scanned by the excitation light. From the incident end surface 104a of the light body 104, the stimulated luminescent light and the stimulated luminescent afterglow from all the locations where the incident end surface 104a can be seen are simultaneously taken in and sent to the photomultiple 105. In this case, compared to the area of the part where the excitation light is incident on the sheet 103 and the stimulated luminescence occurs, the area of the part where the stimulated luminescence afterglow occurs due to the scanning of the excitation light is the same as in the case of the instantaneous luminescence afterglow. Because the intensity of the stimulated luminescence afterglow is extremely large, even if the intensity of the stimulated luminescence afterglow is negligibly small compared to the intensity of the stimulated luminescence light as described above, the amount of light transmitted to the photomultiple 105 is still smaller than that of the stimulated luminescence afterglow. The amount of light can no longer be ignored.

このように輝尽発光光と同時に読み取られる残光は、放
射線透過画像の画像信号のノイズ成分となり正確な放射
線画像情報の読み取りが困難となる。
The afterglow that is read at the same time as the stimulated luminescence light becomes a noise component in the image signal of the radiographic image, making it difficult to read accurate radiation image information.

とくに瞬時発光残光は放射線画像情報を蓄積性螢光体シ
ートへ記録後直ちに読み取りを行なう場合に問題となり
、輝尽発光残光は放射線透過画像が記録された蓄積性螢
光体シート上を励起光が走査するスピードが速くなると
特に問題となってくる。
In particular, instantaneous luminescence afterglow is a problem when reading radiation image information immediately after recording it on a stimulable phosphor sheet, and stimulated luminescence afterglow occurs when radiation image information is excited on a stimulable phosphor sheet on which a radiographic image has been recorded. This becomes a particular problem as the speed at which light scans becomes faster.

次に残光が画像情報に与える影響を第8A図及び第8B
図を用いて具体的に説明する。第8A図はシー1〜1 
(’J 3 aに例えば人体頭部の放射線画像情報を記
録したものを示し、第8B図には線aに治って励起光(
レーザ光)によって走査した時の集光体を介し゛Cフt
トマルに伝わる光量が、横軸に線aの走査に対応する位
置をとって示されている。isB図において、実際にフ
ォトマルに伝わる光量は破線9J1で示され、この破線
見lで示される光量のうち残光く瞬時発光残光a3 J
:ひ輝尽発光残光を合わせたもの)量を鎖線9J3で、
輝尽発光量を実#Q9Jzで示す。すなわち、残光m 
9.3と輝尽発光m 9. zを加え合わせたものが、
フォ1〜マルに伝わる光m 9.1 である。この光f
i 9.1はフォトマルで電気信号に変えられた後対数
変換(LOG変換)され、この対数変換された信号によ
って再生画像が得られる。この場合、フォ1へマルに伝
わる光吊愁1を電気信号に変え対数変換した時と、輝尽
発光ff19J2のみを電気信号に変えこれを対数変換
した時とではその値が異なり、フォトマルに伝わる光m
 ′9.lによる値を用いて画像再生を行なえば、再生
画像は実際の画像とは異なった画像になる。すなわち、
再生画像が不正確もしくは不明瞭になり診断適性上重大
な問題となる。
Next, Figures 8A and 8B show the influence of afterglow on image information.
This will be explained in detail using figures. Figure 8A shows Sea 1-1
(For example, radiation image information of a human head is recorded in J 3 a, and in Fig. 8B, excitation light (
When scanned by a laser beam), the
The amount of light transmitted to the tomaru is shown on the horizontal axis with the position corresponding to the scanning of line a. In the isB diagram, the amount of light actually transmitted to the photomultiplier is shown by the broken line 9J1, and of the amount of light shown by this broken line 1, the afterglow is the instantaneous light emission afterglow a3J.
: The sum of the afterglow afterglow emission) is indicated by the chain line 9J3,
The amount of stimulated luminescence is indicated by actual #Q9Jz. That is, afterglow m
9.3 and stimulated luminescence m9. The sum of z is
The light m 9.1 is transmitted from F1 to F1. This light f
i9.1 is converted into an electrical signal by a photomultiplier and then subjected to logarithmic conversion (LOG conversion), and a reproduced image is obtained from this logarithmically converted signal. In this case, the value is different when the photoluminescence 1 transmitted to the photomultiplier is converted into an electric signal and logarithmically converted, and when only the stimulated luminescence ff19J2 is converted into an electric signal and this is logarithmically converted. light transmitted
'9. If an image is reproduced using the value of l, the reproduced image will be different from the actual image. That is,
The reproduced image becomes inaccurate or unclear, which poses a serious problem in diagnostic suitability.

上記のような残光問題の他に、レーザ光101bの一部
がシート103の表面で反射し、この反射光が更に集光
体104の入射端面104aで反射してシート1’03
の不特定の表面へ回帰して、その部分の螢光体を励起し
て輝尽発光を起してしまう場合がある。かかる被走査部
外から発生リ−る輝尽発光光が読み取られると画像信号
のノイズ成分となり、画像の鮮鋭度を低下させてしまう
In addition to the above-mentioned afterglow problem, a part of the laser beam 101b is reflected on the surface of the sheet 103, and this reflected light is further reflected on the incident end surface 104a of the light condenser 104, and the laser beam 101b is reflected on the surface of the sheet 1'03.
In some cases, the phosphor returns to an unspecified surface and excites the phosphor in that area, causing stimulated luminescence. When such stimulated luminescence light generated from outside the scanned area is read, it becomes a noise component of the image signal and reduces the sharpness of the image.

そこで、上記のような、励起光の走査個所からの輝尽発
光光以外の残光等を集光体の入射端面に入射させないよ
うな手段を備えた装置の開発が望まれており、残光の問
題を解決する1つの方法を提案する発明が本出願人によ
り既に出願されている(特願昭58−153691号)
Therefore, it is desired to develop a device equipped with a means to prevent afterglow, etc. other than stimulated luminescence light from the scanning location of excitation light from entering the incident end face of the light collector, as described above. An invention proposing a method for solving the problem has already been filed by the present applicant (Japanese Patent Application No. 153691/1982).
.

上記の発明による読取装置においては、残光が集光体に
達しないように、励起光のシートへの照射およびシー1
へからの輝尽発光光の集光体への入射のみを許−リ幅の
スリン1〜を有し、前記シートの走査前および走査流の
走査線に沿った部分を覆う遮光部材を集光体の入射端面
とシートの間に設けたことを特徴とするものである。し
かしながら集光体は輝尽発光光の集光効率を高めるため
にシートに近接して配されているために実際に遮光部材
をシートと集光体の間に設けることは空間的に難しいこ
と、ざらに遮光部材によって必要な輝尽発光光をカッ1
へしてしまうことなく集光体が拾うシートの範囲を小さ
くするためには遮光部材のスリットを前記シー1−の範
囲と同程度まで小さくするとどもに遮光部材をシートに
ほとんど接するように配ざなければならず、配置が勤し
くまたスリット幅の微小な遮光部材が作りにくい等の問
題があった。
In the reading device according to the above invention, the excitation light is irradiated onto the sheet and the sheet 1 is
A light-shielding member having a width of 1 to 1 to allow only the incidence of stimulated luminescence light from the body to the condensing body and covering a portion before scanning the sheet and along a scanning line of the scanning stream is used to condense the light. It is characterized in that it is provided between the incident end face of the body and the sheet. However, since the light collector is placed close to the sheet in order to increase the efficiency of collecting stimulated luminescence light, it is spatially difficult to actually provide a light shielding member between the sheet and the light collector. The necessary stimulated luminescence light is cut by the light shielding material.
In order to reduce the range of the sheet picked up by the light condenser without losing it, the slit of the light shielding member is made as small as the range of the sheet 1-, and the light shielding member is placed so that it is almost in contact with the sheet. There were problems such as the arrangement was difficult and it was difficult to make a light shielding member with a minute slit width.

(発明の目的) 本発明は上記のような問題点に鑑みてなされたものであ
り、容易に設計、製造することのできる手段により瞬時
発光残光や輝尽発光残光および被走査部外から発生する
輝尽発光光が集光体に入射するのを防止し、読取りに対
する影響を減少させることにより高精度な読取りを行な
うことのできる放射線画像情報読取装置を提供すること
を目的とするものである。
(Object of the Invention) The present invention has been made in view of the above-mentioned problems, and it is possible to eliminate instantaneous luminescence afterglow, stimulated luminescence afterglow, and from outside the scanned part by means that can be easily designed and manufactured. The object of the present invention is to provide a radiation image information reading device that can perform highly accurate reading by preventing the generated stimulated luminescence light from entering a condenser and reducing its influence on reading. be.

(発明の構成) 本発明の放射線画像情報読取装置は、シー1へと集光体
の入射端面との間に主走査方向に延びたスリットを有し
た輝尽発光光以外の光が入射端面に達することを防止す
る遮光部材を備え、さらに前記シー1への走査点から発
ゼられた輝尽発光光を副走査方向にのみ前記スリット内
に集束させて、このスリットを通して前記集光体の入射
端面に前記輝尽発光光を入射させる光学系を備えたこと
を特徴とするものである。上記光学系は、走査点からの
輝尽発光光をシリンドリカルレンズに入射させて、前記
スリット内で副走査方向にのみ集束させるものであり、
シリンドリカルレンズを通過した輝尽発光光をミラーに
より反則さゼる等して輝尽発光光が前記スリット内にお
いて集束Vるまでに任意の光路を通るように設計するこ
とができる。
(Structure of the Invention) The radiation image information reading device of the present invention has a slit extending in the main scanning direction between the sheath 1 and the incident end surface of the condenser, so that light other than stimulated luminescence light is transmitted to the incident end surface. The light shielding member is provided to prevent the light from reaching the beam, and further focuses the stimulated luminescent light emitted from the scanning point toward the sea 1 into the slit only in the sub-scanning direction, so that the light enters the light condenser through the slit. The device is characterized in that it includes an optical system that allows the stimulated luminescence light to enter the end face. The optical system makes the stimulated luminescence light from the scanning point enter the cylindrical lens and focuses it only in the sub-scanning direction within the slit,
It can be designed such that the stimulated luminescence light that has passed through the cylindrical lens is deflected by a mirror so that the stimulated luminescence light passes through an arbitrary optical path before being focused within the slit.

従って、本発明の読取装置は残光等が集光体に達するこ
とのないようにするとともに、読取装置の設計をより容
易にかつ多様にするものである。
Therefore, the reading device of the present invention prevents afterglow and the like from reaching the light condenser, and makes the design of the reading device easier and more versatile.

(実IM態様) 以下、図面を参照して本発明の実施態様について説明す
る。
(Actual IM Mode) Hereinafter, embodiments of the present invention will be described with reference to the drawings.

第1図は本発明の一実施態様による読取装置の走査部近
辺の構造を示す断面図である。
FIG. 1 is a cross-sectional view showing the structure around the scanning section of a reading device according to an embodiment of the present invention.

蓄積性螢光体シート3は矢印B方向に副走査のために移
動される。励起光としてのレーザ走査光1bは前記シー
ト3上を走査線3aに沿って主走査し、レーザ走査光1
bが照射されたシート3上の走査位置からは輝尽発光光
1Gが発せられる。
The stimulable phosphor sheet 3 is moved in the direction of arrow B for sub-scanning. The laser scanning light 1b as excitation light main scans the sheet 3 along the scanning line 3a, and the laser scanning light 1b
Stimulated luminescence light 1G is emitted from the scanning position on the sheet 3 irradiated with b.

また前記シート3の上方にはこの輝尽発光光1Cを画角
θの範囲で入射させ、副走査方向にのみ集束させるシリ
ンドリカルレンズ5が設けられており、輝尽発光光1G
はこのシリンドリカルレンズ5により、シリンドリカル
レンズ5の上方で集束し、この集束位置のすぐ上方に設
けられた集光体4の入射端面4aに入射する。
Further, above the sheet 3, there is provided a cylindrical lens 5 which allows the stimulated luminescence light 1C to enter within the range of the field angle θ and focuses it only in the sub-scanning direction.
is focused above the cylindrical lens 5 by this cylindrical lens 5, and is incident on the incident end surface 4a of the light condenser 4 provided immediately above the focusing position.

シート3は走査前の部分3Aから蓄積記録時の瞬時発光
の残光1Aを発し、走査直後の部分3Bから輝尽発光の
残光1Bを発している。これらの残光が前記集光体4に
入射することを防ぐために集光体4の下方には遮光部材
6が設けられている。
The sheet 3 emits an afterglow 1A of instantaneous luminescence during storage recording from a portion 3A before scanning, and an afterglow 1B of stimulated luminescence from a portion 3B immediately after scanning. In order to prevent these afterglow lights from entering the light condenser 4, a light shielding member 6 is provided below the light condenser 4.

この遮光部材6はその中央部に主走査方向に延びた主走
査の幅以上の長さを有するスリット6aを有しており、
前記輝尽発光光1Cのシリンドリカルレンズ5による集
束位置がスリット6a内にくるように配置されている。
This light shielding member 6 has a slit 6a extending in the main scanning direction and having a length equal to or greater than the main scanning width in the center thereof.
The cylindrical lens 5 is arranged so that the focused position of the stimulated luminescence light 1C is within the slit 6a.

このスリット6aの幅Wは、走査位置からシリンドリカ
ルレンズ5までの距離をaとし、シリンドリカルレンズ
5から輝尽発光光の集束位置までの距離をbとし、b 
/、 aで表わされるシリンドリカルレンズの結像倍率
をMとし、さらに発光光を集光したいシート3の幅をS
とするとSXMにより規定される。従って結像倍率Mを
大きくすれば集光範囲の5幅Sを小さくして、もスリッ
ト6aの幅Wを十分に大きくすることができ、スリット
の作成が容易となる。なおシリンド1シルレンズ5は、
集光範囲からの輝尽発光光をもれなく入射させるために
はできるだけシート3に近づけて配する、(画角θを大
きくする)必要があるため焦点距離が小さいものを用い
るのが好ましく、比較的焦点距離の小さいものを得るこ
とができる丸棒レンズまたは半丸棒レンズを用いるとよ
い。また、上記の本実施態様においてはレーザ走査光1
bは図示のとJ3す、遮光部材6の下方に配された反射
鏡7により反則された後シリンドリカルレンズ5を軽−
Cシート3上を走査するようになっているがレーザ走査
光1bに対してはシリンドリフコルレンズ5はレンズ作
用をする必要はないことから第2図に示すように、シリ
ンド1シカルレンズ5の、レーザ走査光1bの入射部分
は平坦にしてもよい。
The width W of this slit 6a is defined as a distance from the scanning position to the cylindrical lens 5, a distance from the cylindrical lens 5 to the focal position of the stimulated luminescence light, and b.
The imaging magnification of the cylindrical lens represented by /, a is M, and the width of the sheet 3 on which the emitted light is to be focused is S.
Then, it is defined by SXM. Therefore, by increasing the imaging magnification M, the width S of the condensing range can be decreased, and the width W of the slit 6a can be made sufficiently large, making it easier to create the slit. The cylinder 1 sill lens 5 is
In order to make all of the stimulated luminescence light from the condensing range incident, it is necessary to arrange it as close to the sheet 3 as possible (increase the angle of view θ), so it is preferable to use a lens with a short focal length, and it is preferable to use a lens with a relatively short focal length. It is preferable to use a round bar lens or a semi-round bar lens that can provide a short focal length. Furthermore, in this embodiment described above, the laser scanning light 1
b is shown in the figure, and the cylindrical lens 5 is lightened after being deflected by the reflecting mirror 7 disposed below the light shielding member 6.
Although the C-sheet 3 is scanned, the cylindrical lens 5 does not need to act as a lens for the laser scanning light 1b, so as shown in FIG. The incident portion of the laser scanning light 1b may be made flat.

次に第3図を参照して本発明の他の実施態様による輝尽
発光光を集光体に集める光学系について説明する。
Next, with reference to FIG. 3, an optical system for collecting stimulated luminescence light on a condenser according to another embodiment of the present invention will be described.

第3図< a、)に丞す実施態様においては、焦点距離
の等しい2つのシリンドリカルレンズ5A。
In the embodiment shown in FIG. 3<a,), two cylindrical lenses 5A having the same focal length are used.

5Bが副走査方向に連続して配されている。これは1つ
のシリンド1シカルレンズを用いたのでは画角θを十分
大きくとることかできない場合に有効で′あり、それぞ
れのシリンドリカルレンズを経た輝尽発光光はそれぞれ
の光路上に設けられた反射鏡8A、8Bによって反射さ
れ、遮光部材6のスリッl〜6a内の同一位置で集束す
るように導かれる。また第3図(b)に示す他の実施態
様も画角θ、を大きくするために有効なものであり、軸
が同一である3つのシリンドリカルレンズ5C15D、
51を連続して設け、スリン1−≠ ンズをそれぞれ経た輝尽発光光を集束させるものである
5B are arranged continuously in the sub-scanning direction. This is effective when it is not possible to obtain a sufficiently large angle of view θ by using one cylindrical lens. It is reflected by 8A and 8B and guided to be focused at the same position within the slits 1 to 6a of the light shielding member 6. Another embodiment shown in FIG. 3(b) is also effective for increasing the angle of view θ, and includes three cylindrical lenses 5C15D with the same axis,
51 are provided in series to focus the stimulated luminescent light that has passed through each lens.

さらに、第1図に示した本発明の第1の実施態様におい
てはレーザ走査光1bは遮光部材6の下方からシート3
上に照射していたが、レーザ走査光1bは第4図に示す
ように、遮光部材6の上方から照射することも可能であ
る。すなわち、遮光部材6の遮光部分6Aをレーザ走査
光1bの波長の光を透過し、輝尽発光光および残光の波
長の光をカットするダイクロ膜とし、遮光部材6のスリ
ット部分6Bを透明の膜もしくは輝尽発光光の波長の光
を通し、レーザ走査光の波長の光をカットづるダイクロ
1膜とづ−ることにより、残光を遮光しつつレーザ走査
光を遮光部材の上方から照射することを可能にしたもの
である。以上本発明の実施態様について説明したが、本
発明は上記の実施態様以外にも光学系の配置や組み合わ
け等により種々の態様の装置を設計することがijJ能
であり、極めて応用範囲の広いものである。
Furthermore, in the first embodiment of the present invention shown in FIG.
Although the laser scanning light 1b is irradiated upwardly, it is also possible to irradiate the laser scanning light 1b from above the light shielding member 6, as shown in FIG. That is, the light-shielding portion 6A of the light-shielding member 6 is made of a dichroic film that transmits light of the wavelength of the laser scanning light 1b and cuts the light of the wavelength of stimulated luminescence and afterglow, and the slit portion 6B of the light-shielding member 6 is made of a transparent film. The laser scanning light is irradiated from above the light shielding member while blocking afterglow by using a film or dichroic film that passes light with the wavelength of stimulated luminescence light and cuts light with the wavelength of laser scanning light. This is what made it possible. Although the embodiments of the present invention have been described above, the present invention has the ability to design devices in various modes other than the above-mentioned embodiments by changing the arrangement and combination of optical systems, and has an extremely wide range of applications. It is something.

なa5、本発明の放射線画像情報読取装置を構成する集
光体の形状は、第5図に示される形状に限られるもので
はなく、例えば本出願人が先に出願した特願昭58−2
27543号に記載されているにうに、射出端面が複数
に区画され、各々の区画に7オトマル等の光検出器が接
続されているような形状であってもよい。
a5, the shape of the condenser constituting the radiation image information reading device of the present invention is not limited to the shape shown in FIG.
As described in No. 27543, the exit end face may be divided into a plurality of sections, and each section may be connected to a photodetector such as a 7-meter.

(発明の効゛果) 以上詳細に説明したように、本発明の放射線画像情報読
取装置によれば、遮光部材により残光が集光体の入射端
面に達するのが防止され、輝尽発光光のみがスリットを
通して集光体に導かれるので、読取りにおける残光の影
響を大きく低下させることができるとともに、レーザ走
査の一部がシートの表面で反射して集光体の入射端面に
到達するのが妨げられ、または前記反射光が入射端面か
らシートへ回帰するのが防止されるため、被走査部外で
輝尽発光が発生することがなくなり、鮮鋭度の高い画像
を得ることができる。また、シリンドリカルレンズを含
む光学系を遮光部材とシートの間に配したことにより遮
光部材および集光体をシートに近接して配する必要がな
くなり、設h1が容易になるとともに、シリンドリカル
レンズの結像倍率を大きくするとスリット幅が大きくて
も十分な残光の遮光効果が得られ、遮光部材の作成が容
易になるなどその実用上の価値は極めて大きい。
(Effects of the Invention) As described above in detail, according to the radiation image information reading device of the present invention, the light shielding member prevents afterglow from reaching the incident end surface of the light collector, and stimulated luminescence Since only the laser beam is guided through the slit to the condenser, the influence of afterglow on reading can be greatly reduced, and a part of the laser scan is reflected from the surface of the sheet and reaches the incident end face of the condenser. Since the reflected light is prevented from returning to the sheet from the incident end surface, stimulated luminescence will not occur outside the scanned area, and an image with high sharpness can be obtained. In addition, by disposing the optical system including the cylindrical lens between the light shielding member and the sheet, it is no longer necessary to arrange the light shielding member and the light condenser close to the sheet, which simplifies the installation h1. When the image magnification is increased, a sufficient afterglow light shielding effect can be obtained even if the slit width is large, and the production of a light shielding member is facilitated, which has extremely great practical value.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施態様による読取装置の走査部近
辺の構造を示す断面図、 第2図は第1図に示す実施態様におけるシリンドリカル
レンズの形状を示す第1図の一部拡大図、第3図は本発
明の他の実施態様による走査部の光学系を示す断面図、 第4図は本発明の他の実施態様による走査部近辺の構造
を示す断面図、 第5図は従来の放射線画像情報読取装置の一例を示す概
略図、 第6図は瞬時発光残光の経時特性を示すグラフ、第7図
は輝尽発光残光の経時特性を示すグラフ、第8A図は人
体頭部の放射線画像情報を記録したシートを示し、 第8B図は第8A図の放射線画像情報の記録されたシー
ト上を励起光により走査した時の集光体を介してフA1
〜マルに伝わる発光強度を示すグラフである。 1b・・・レーザ走査光  1C・・・輝尽発光光4・
・・集光体 5.5へ、5B、5C,5,o、!5E・・・シリンド
リカルレンズ 6・・・遮光部材     6a・・・スリット第1図 第2図 第3図 第6図    第7図 第8A図 第88図 (自発)手続?■正書 特許庁長官 殿           昭和59年9月
20日1、事件の表示 特願昭59−171227景 2、発明の名称 放射線画像情報読取装置 3、補正をする者 事件との関係     特許出願人 任 所   神奈川県南足柄市中沼210番地名 称 
   富士写真フィルム株式会社4、代理人 東京都港区六本木5丁目2番1号 6、補正により増加する発明の数   な  し特許請
求の範囲 放射線画像情報が蓄積記録された蓄積性螢光体シート上
を励起光により主走査して輝尽発光光を生ぜしめる主走
査手段、前記シートと励起光を相対的に主走査方向とほ
ぼ直角な方向に移動させて副走査する副走査手段、前記
主走査の方向に表と走査線と平行に延びた入射端面を有
し、こ9−入射端面から入射した光を射出端面まで案内
する集光体、この集光体の射出端面に接続された光検出
器、前記シートの表面と前記集光体の入射端面との間に
配設された、主走査方向に延びたスリットを有する遮光
部材、および前記シートの走査点から発せられた輝尽発
光光を前記シート上方に設けられたシリンドリカルレン
ズにより副走査方向にのみ集束させて、前記スリットを
通して前記集光体の入射端面に入射させる光学系を備え
たことを特徴とする放射線画像情報読取装置。 (自発)手続補正書 特許庁長官 殿          昭和59年11月
8日2、発明の名称 放射線画像情報読取装置 3、補正をする者 事件との関係    特許出願人 住 所   神奈川県南足柄市中沼210番地名 称 
   富士写真フィルム株式会社4、代理人 東京都港区六本木5丁目2番1号 6、補正により増加する発明の数  な  し7、補正
の対象 第 3 (a) □−−−i ]
FIG. 1 is a sectional view showing the structure near the scanning section of a reading device according to an embodiment of the present invention, and FIG. 2 is a partially enlarged view of FIG. 1 showing the shape of the cylindrical lens in the embodiment shown in FIG. , FIG. 3 is a cross-sectional view showing the optical system of the scanning section according to another embodiment of the present invention, FIG. 4 is a cross-sectional view showing the structure near the scanning section according to another embodiment of the present invention, and FIG. 5 is a conventional one. 6 is a graph showing the temporal characteristics of instantaneous luminescence afterglow, FIG. 7 is a graph showing the temporal characteristics of stimulated luminescence afterglow, and FIG. 8A is a graph showing the temporal characteristics of stimulated luminescence afterglow. FIG. 8B shows a sheet on which radiation image information of FIG.
It is a graph showing the luminescence intensity transmitted to ~ circle. 1b... Laser scanning light 1C... Stimulated luminescence light 4.
...to the condenser 5.5, 5B, 5C, 5, o,! 5E... Cylindrical lens 6... Light blocking member 6a... Slit Figure 1 Figure 2 Figure 3 Figure 6 Figure 7 Figure 8A Figure 88 (voluntary) Procedure? ■Authentic Director General of the Patent Office September 20, 1980 1, Indication of the case Patent application 171227/1982 2, Name of the invention Radiographic image information reading device 3, Person making the amendment Relationship to the case Appointment of patent applicant Address: 210 Nakanuma, Minamiashigara City, Kanagawa Prefecture Name:
Fuji Photo Film Co., Ltd. 4, Agent 5-2-1-6 Roppongi, Minato-ku, Tokyo Number of inventions increased by amendment None Claims: On a stimulable phosphor sheet on which radiation image information is stored and recorded main scanning means for main-scanning the sheet with excitation light to generate stimulated luminescence light; sub-scanning means for sub-scanning by moving the sheet and the excitation light relatively in a direction substantially perpendicular to the main-scanning direction; 9 - a light condenser that guides the light incident from the input end face to the exit end face; a light detector connected to the exit end face of the light collector; a light shielding member having a slit extending in the main scanning direction, which is disposed between the surface of the sheet and the incident end surface of the light condensing body, and a light shielding member having a slit extending in the main scanning direction; A radiation image information reading device comprising an optical system that focuses the light only in the sub-scanning direction using a cylindrical lens provided above the sheet and causes the light to enter the incident end surface of the light collector through the slit. (Voluntary) Procedural amendment Dear Commissioner of the Japan Patent Office November 8, 1980 2 Name of the invention Radiographic image information reading device 3 Relationship to the person making the amendment Case Patent applicant address Address 210 Nakanuma, Minamiashigara City, Kanagawa Prefecture name
Fuji Photo Film Co., Ltd. 4, Agent 5-2-1-6 Roppongi, Minato-ku, Tokyo Number of inventions increased by amendment None 7 Subject of amendment No. 3 (a) □---i]

Claims (1)

【特許請求の範囲】[Claims] 被写体の画像情報が蓄積記録された蓄積性螢光体シート
上を励起光により主走査して輝尽発光光を生ぜしめる主
走査手段、前記シートと励起光を相対的に主走査方向と
ほぼ直角な方向に移動させて副走査する副走査手段、前
記主走査の方向に延びた入射端面を有し、この端面を主
走査線に平行に配し、入射端面から入射した光を射出端
面まで案内する集光体、この集光体の射出端面に接続さ
れた光検出器、前記シートの表面と前記集光体の入射端
面との間に配設された、主走査方向に延びたスリットを
有する遮光部材、および前記シートの走査点から発せら
れた輝尽発光光を前記シート上方に設けられたシリンド
リカルレンズにより副走査方向にのみ集束させて、前記
スリットを通して前記集光体の入射端面に入射させる光
学系を備えたことを特徴とする放射線画像情報読取装置
a main scanning means for generating stimulated luminescence light by main scanning a stimulable phosphor sheet on which image information of a subject is stored and recorded using excitation light; a sub-scanning means for performing sub-scanning by moving in a direction, an entrance end surface extending in the main scanning direction, the end surface being arranged parallel to the main scanning line, and guiding light incident from the entrance end surface to an exit end surface; a light collector, a photodetector connected to an exit end face of the light collector, and a slit extending in the main scanning direction, disposed between the surface of the sheet and the entrance end face of the light collector. A light shielding member and a cylindrical lens provided above the sheet focus the stimulated luminescent light emitted from the scanning point of the sheet only in the sub-scanning direction and make it enter the incident end surface of the light condenser through the slit. A radiation image information reading device comprising an optical system.
JP59171227A 1984-08-17 1984-08-17 Reader for radiation image information Granted JPS6149556A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP59171227A JPS6149556A (en) 1984-08-17 1984-08-17 Reader for radiation image information
US06/766,202 US4800276A (en) 1984-08-17 1985-08-16 Radiation image read-out apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59171227A JPS6149556A (en) 1984-08-17 1984-08-17 Reader for radiation image information

Publications (2)

Publication Number Publication Date
JPS6149556A true JPS6149556A (en) 1986-03-11
JPH0448022B2 JPH0448022B2 (en) 1992-08-05

Family

ID=15919399

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59171227A Granted JPS6149556A (en) 1984-08-17 1984-08-17 Reader for radiation image information

Country Status (1)

Country Link
JP (1) JPS6149556A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012074727A (en) * 2004-03-26 2012-04-12 Semiconductor Energy Lab Co Ltd Manufacturing method for semiconductor device, and laser irradiation apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5952160A (en) * 1982-09-17 1984-03-26 株式会社東芝 Pefrigeration cycle

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5952160A (en) * 1982-09-17 1984-03-26 株式会社東芝 Pefrigeration cycle

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012074727A (en) * 2004-03-26 2012-04-12 Semiconductor Energy Lab Co Ltd Manufacturing method for semiconductor device, and laser irradiation apparatus
US9296068B2 (en) 2004-03-26 2016-03-29 Semiconductor Energy Laboratory Co., Ltd. Laser irradiation method and laser irradiation apparatus

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