JPS6149447U - - Google Patents

Info

Publication number
JPS6149447U
JPS6149447U JP13369184U JP13369184U JPS6149447U JP S6149447 U JPS6149447 U JP S6149447U JP 13369184 U JP13369184 U JP 13369184U JP 13369184 U JP13369184 U JP 13369184U JP S6149447 U JPS6149447 U JP S6149447U
Authority
JP
Japan
Prior art keywords
wafer cassette
view
protrusions
manufacturing process
identification code
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13369184U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13369184U priority Critical patent/JPS6149447U/ja
Publication of JPS6149447U publication Critical patent/JPS6149447U/ja
Pending legal-status Critical Current

Links

JP13369184U 1984-09-03 1984-09-03 Pending JPS6149447U (US20020193084A1-20021219-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13369184U JPS6149447U (US20020193084A1-20021219-M00002.png) 1984-09-03 1984-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13369184U JPS6149447U (US20020193084A1-20021219-M00002.png) 1984-09-03 1984-09-03

Publications (1)

Publication Number Publication Date
JPS6149447U true JPS6149447U (US20020193084A1-20021219-M00002.png) 1986-04-03

Family

ID=30692229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13369184U Pending JPS6149447U (US20020193084A1-20021219-M00002.png) 1984-09-03 1984-09-03

Country Status (1)

Country Link
JP (1) JPS6149447U (US20020193084A1-20021219-M00002.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63153517U (US20020193084A1-20021219-M00002.png) * 1987-03-28 1988-10-07
JP2011018908A (ja) 2010-07-15 2011-01-27 Hitachi Kokusai Electric Inc 基板処理装置および半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63153517U (US20020193084A1-20021219-M00002.png) * 1987-03-28 1988-10-07
JP2011018908A (ja) 2010-07-15 2011-01-27 Hitachi Kokusai Electric Inc 基板処理装置および半導体装置の製造方法

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