JPS6149280U - - Google Patents
Info
- Publication number
- JPS6149280U JPS6149280U JP13281884U JP13281884U JPS6149280U JP S6149280 U JPS6149280 U JP S6149280U JP 13281884 U JP13281884 U JP 13281884U JP 13281884 U JP13281884 U JP 13281884U JP S6149280 U JPS6149280 U JP S6149280U
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- water
- tank
- cooled
- reserve tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000498 cooling water Substances 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 239000003507 refrigerant Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13281884U JPH0248784Y2 (de) | 1984-08-31 | 1984-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13281884U JPH0248784Y2 (de) | 1984-08-31 | 1984-08-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6149280U true JPS6149280U (de) | 1986-04-02 |
| JPH0248784Y2 JPH0248784Y2 (de) | 1990-12-20 |
Family
ID=30691373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13281884U Expired JPH0248784Y2 (de) | 1984-08-31 | 1984-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0248784Y2 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015001372A (ja) * | 2013-06-17 | 2015-01-05 | ファイン セミテック コーポレーション | 半導体プロセス用冷却装置 |
-
1984
- 1984-08-31 JP JP13281884U patent/JPH0248784Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0248784Y2 (de) | 1990-12-20 |